Monolithic integration of CMOS VLSI and carbon nanotubes for hybrid nanotechnology applications

IEEE Transactions on Nanotechnology

Volumn 7, Issue 5, 2008, Pages 636-639

  Akinwande, Deji ^a   Yasuda, Shinichi ^b   Paul, Bipul ^b   Fujita, Shinobu ^b   Close, Gael ^a   Philip Wong, H S ^a  

^a Stanford University   (United States)

^b TOSHIBA CORPORATION   (Japan)

Author keywords

Analog circuits; Carbon nanotubes (CNTs); Cascode amplifier; Monolithic integration

Indexed keywords

APPLICATIONS; AUTOMOBILE ELECTRONIC EQUIPMENT; MONOLITHIC INTEGRATED CIRCUITS; NANOCOMPOSITES; NANOPORES; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOTECHNOLOGY; NANOTUBES; OPTICAL SENSORS; SEMICONDUCTING SILICON COMPOUNDS; SENSOR NETWORKS; SENSORS; SIGNAL PROCESSING; SILICON;

ANALOG CIRCUITS; CARBON NANOTUBES (CNTS); CASCODE AMPLIFIER; MONOLITHIC INTEGRATION;

CARBON NANOTUBES;

EID: 53349141569     PISSN: 1536125X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNANO.2008.2003438     Document Type: Article

References (19)

1. P. Avouris, Z. Chen, and V. Perebeinos, "Carbon-based electronics," Nat. Nanotechnol., vol. 2, pp. 605-615, 2007.
2. A. Naeemi, R. Sarvari, and J. D. Meindl, "Performance comparison between carbon nanotube and copper interconnects for gigascale integration (GSI)," IEEE Electron Device Lett., vol. 26, no. 2, pp. 84-86, Feb. 2005.
3. D. Akinwande, G. F. Close, and H.-S. P. Wong, "Analysis of the frequency response of carbon nanotube transistors," IEEE Trans. Nanotechnol., vol. 5, no. 5, pp. 599-605, Sep. 2006.
4. C. Kocabas, H.-S. Kim, T. Banks, J. A. Rogers, A. A. Pesetski, J. E. Baumgardner, S. V. Krishnaswamy, and H. Zhang, "Radio frequency analog electronics based on carbon nanotube transistors," Proc. Nat. Acad. Sci. USA, vol. 105, pp. 1405-1409, Feb. 2008.
5. E. S. Snow, F. K. Perkins, E. J. Houser, S. C. Badescu, and T. L. Reinecke, "Chemical detection with a single-walled carbon nanotube capacitor," Science, vol. 307, pp. 1942-1945, Mar. 2005.
6. P. Qi, O. Vermesh, M. Grecu, A. Javey, Q. Wang, H. Dai, S. Peng, and K. J. Cho, "Toward large arrays of multiplex functionalized carbon nanotube sensors for highly sensitive and selective molecular detection," Nano Lett., vol. 3, pp. 347-351, 2003.
7. J. Li, Y. Lu, Q. Ye, M. Cinke, J. Han, and M. Meyyappan, "Carbon nanotube sensors for gas and organic vapor detection," Nano Lett., vol. 3, pp. 929-933, 2003.
8. S. J. Kang, C. Kocabas, T. Ozel, M. Shim, N. Pimparkar, M. A. Alam, S. V. Rotkin, and J. A. Rogers, "High-performance electronics using dense, perfectly aligned arrays of single-walled carbon nanotubes," Nat. Nanotechnol., vol. 2, pp. 230-236, 2007.
9. M. S. Arnold, A. A. Green, J. F. Hulvat, S. I. Stupp, and M. C. Hersam, "Sorting carbon nanotubes by electronic structure using density differentiation," Nat. Nanotechnol., vol. 1, pp. 60-65, 2006.
10. A. Nish, J.-Y. Hwang, J. Doig, and R. J. Nicholas, "Highly selective dispersion of single-walled carbon nanotubes using aromatic polymers," Nat. Nanotechnol., vol. 2, pp. 640-646, 2007.
11. T. S. Cho, K.-J. Lee, J. Kong, and A. Chandrakasan, "Low power carbon nanotube chemical sensor system," in IEEE Custom Integr. Circuits Conf., San Jose, CA, Sep. 16-19, 2007, pp. 181-184.
12. R. S. Chakraborty, S. Narasimhan, and S. Bhunia, "Hybridization of CMOS with CNT-based nano-electromechanical switch for low leakage and robust circuit design," IEEE Trans. Circuits Syst. I, Reg. Papers, vol. 54, no. 11, pp. 2480-2488, Nov. 2007.
13. Y. C. Tseng, P. Xuan, A. Javey, R.Malloy, Q. Wang, J. Bokor, and H. Dai, "Monolithic integration of carbon nanotube devices with silicon MOS technology," Nano Lett., vol. 4, pp. 123-127, 2004.
14. H. Lin, Y. W. Park, and S. Tiwari, "A compact single-walled carbon nanotube transistor integrated with a silicon MOSFET using a single common gate," in Proc. Mater. Res. Symp., Boston, MA, 2006, Paper 963, 0963-Q14-04.
15. C. Chen, D. Xu, E. S. Kong, and Y. Zhang, "Multichannel carbon-nanotube FETs and complementary logic gates with nanowelded contacts," IEEE Electron Device Lett., vol. 27, no. 10, pp. 852-855, Oct. 2006.
16. G. Close and H.-S. P. Wong, "Fabrication and characterization of carbon nanotube interconnects," in IEEE IEDM Tech. Dig., Washington, DC, Dec. 2007, pp. 203-206.
17. S. Heinze, M. Radosavljevic, J. Tersoff, and P. Avouris, "Unexpected scaling of the performance of carbon nanotube Schottky-barrier transistors," Phys. Rev. B, vol. 68, no. 23, pp. 235418-1-235418-5, 2003.
18. J. Deng, N. Patil, K. Ryu, A. Badmaev, C. Zhou, S. Mitra, and H.-S. P. Wong, "Carbon nanotube transistor circuits: Circuit-level performance benchmarking and design options for living with imperfections," in IEEE ISSCC Tech. Dig., San Francisco, CA, Feb. 2007, pp. 70-588.
19. A. Javey, J. Guo, Q. Wang, M. Lundstrom, and H. J. Dai, "Ballistic carbon nanotube field-effect transistors," Nature, vol. 424, pp. 654-657, 2003.