Nanofabrication by mechanical and electrical processes using electrically conductive diamond tip

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 5, 2008, Pages 1660-1665

  Miyake, Shojiro ^a   Zheng, Haifeng ^a   Kim, Jongduk ^a   Wang, Mei ^a  

^a NIPPON INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL OXYGEN DEMAND; DIAMONDS; ELECTRIC PROPERTIES; ELECTROCHEMICAL PROPERTIES; MICROSCOPIC EXAMINATION; NANOSTRUCTURES; OXIDATION; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SILICON WAFERS;

ATOMIC FORCE; COMPLEX PROCESSING; ELECTRICAL PROCESSING; ELECTRICAL VOLTAGE; ELECTRICALLY CONDUCTIVE DIAMOND; ELECTRO-CHEMICAL REACTION; HIGH LOAD; LOCAL OXIDATION; MECHANO-CHEMICAL; NANO-FABRICATION; OXIDIZED SILICON WAFERS; SCHOTTKY;

MECHANICAL PROPERTIES;

EID: 53349117985     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2965815     Document Type: Article

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