Nanoprocessing of carbon and boron nitride nanoperiod multilayer films

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 42, Issue 3 B, 2003, Pages

  Miyake, Shojiro ^a   Kim, Jongduk ^a  

^a NIPPON INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Boron nitride; Carbon; Modulus of dissipation; Nanoindentation hardness; Nanoperiod multilayer film; Nanoprocessing

Indexed keywords

BORON COMPOUNDS; CARBON NITRIDE; DEFORMATION; FRICTION; HARDNESS; INDENTATION; INTERFACES (MATERIALS); SPUTTERING;

BORON NITRIDE; MULTILAYER FILMS; NANOINDENTATION HARDNESS; NANOPROCESSING;

NANOSTRUCTURED MATERIALS;

EID: 0038699287     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.l322     Document Type: Letter

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