Characterization of organic polymer thin films deposited by rf magnetron sputtering

Vacuum

Volumn 83, Issue 3, 2008, Pages 564-568

  Oya, Toshiyuki ^a   Kusano, Eiji ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

PI; Polymer; PTFE; Sputtering; Thin film

Indexed keywords

CARBON FILMS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FOURIER TRANSFORMS; IMAGING TECHNIQUES; INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; MOLECULAR ORBITALS; MOLECULAR SPECTROSCOPY; PHOTOELECTRON SPECTROSCOPY; PLASTIC FILMS; POLYMER FILMS; POLYMERS; SPECTROSCOPIC ANALYSIS; SPECTRUM ANALYSIS; THICK FILMS; THIN FILMS;

FOURIER TRANSFORM INFRARED SPECTROSCOPY (FTIR); PI; POLY TETRAFLUOROETHYLENE; POLYIMIDE; POLYMER; POLYMER THIN FILMS; PTFE; RF-MAGNETRON SPUTTERING; SCANNING ELECTRON MICROSCOPY (SEM); SPUTTERING; THIN FILM; WATER-REPELLENCY; X-RAY PHOTOELECTRON SPECTROSCOPY XPS;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 52949142224     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.04.040     Document Type: Article

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