Thin polymer films from polyimide vacuum thermal degradation with and without a glow discharge

Vacuum

Volumn 80, Issue 8, 2006, Pages 923-929

  Choukourov, A ^a   Hanus J ^a   Kousal, J ^a   Grinevich, A ^a   Pihosh, Y ^a   Slavinska D ^a   Biederman, H ^a  

^a CHARLES UNIVERSITY   (Czech Republic)

Author keywords

Glow discharge; Polyimide; Thermal degradation; Thin polyimide like films

Indexed keywords

ATOMIC FORCE MICROSCOPY; GLOW DISCHARGES; MAGNETRONS; POLYIMIDES; PYROLYSIS; SURFACE ROUGHNESS; SURFACE TOPOGRAPHY;

PLASMA POLYMER FILMS; POLYIMIDE VACUUM THERMAL DEGRADATION; THIN POLYIMIDE-LIKE FILMS;

THIN FILMS;

EID: 33747387182     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.12.012     Document Type: Article

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