Submicron scale patterning in sintered silica colloidal crystal films using a focused ion beam

Langmuir

Volumn 24, Issue 18, 2008, Pages 10532-10536

  Moran, Jeffrey L ^a   Wheat, Philip M ^a   Posner, Jonathan D ^a  

^a Arizona State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL SYSTEMS; COLLOIDAL CRYSTAL; COLLOIDAL CRYSTAL FILMS; DIRECT PATTERNING; FLUIDIC CHANNELS; FOCUSED ION BEAM MILLING; INTEGRATED PHOTONIC DEVICES; OPTOFLUIDIC DEVICES; POROUS BOUNDARIES; RECTANGULAR CAVITIES; SINTERED FILMS; SUB-MICRON SCALE; SUB-MICRON SIZES;

COLLOIDS; FOCUSED ION BEAMS; ION BEAMS; ION BOMBARDMENT; IONS; LITHOGRAPHY; PLASTIC FILMS; POWDERS; SILICA; SILICATE MINERALS; SILICON COMPOUNDS; SINTERING; SPHERES;

BEAM PLASMA INTERACTIONS;

EID: 52649105392     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la801772q     Document Type: Article

References (33)

1. Jiang, P.; Bertone, J. F.; Hwang, K. S.; Colvin, V. L. Chem. Mater. 1999, 11(8), 2132-2140.
2. Yang, S. M.; Miguez, H.; Ozin, G. A. Adv. Funct. Mater. 2002, 12(6-7), 425-431.
3. Baek, K. H.; Gopinath, A. IEEE Photon. Technol. Lett. 2005, 17(2), 351-353.
4. Zhao, Y.; Avrutsky, I. Opt. Lett. 1999, 24(12), 817-819.
5. Hu, X. B.; Li, G. T.; Huang, J.; Zhang, D.; Qiu, Y. Adv. Mater. 2007, 19(24), 4327-+.
6. Lee, Y. J.; Braun, P. V. Adv. Mater. 2003, 15(7-8), 563-566.
7. Zheng, S. P.; Ross, E.; Legg, M. A.; Wirth, M. J. J. Am. Chem. Soc. 2006, 128(28), 9016-9017.
8. Tetreault, N.; Miguez, H.; Yang, S. M.; Kitaev, V.; Ozin, G. A. Adv. Mater. 2003, 15(14), 1167.
9. Vekris, E.; Kitaev, V.; von Freymann, G.; Perovic, D. D.; Aitchison, J. S.; Ozin, G. A. Adv. Mater. 2005, 17(10), 1269.
10. Yan, Q.F.; Zhou, Z.C.; Zhao, X. S.; Chua, S. J. Adv. Mater. 2005, 17(15), 1917.
11. Yan, Q. F.; Chen, A.; Chua. S. J.; Zhao, X. S. Adv. Mater. 2005, 17(23), 2849.
12. Lee, S. K.; Yi, G. R.; Yang, S. M. Lab Chip 2006, 6(9), 1171-1177.
13. Park, J.; Lee, D.; Kim, W.; Horiike, S.; Nishimoto, T.; Lee, S. H.; Ahn. C. H. Anal. Chem. 2007, 79(8), 3214-3219.
14. Oleschuk, R. D.; Shultz-Lockyear, L. L.; Ning, Y. B.; Harrison, D. J. Anal. Chem. 2000, 72(3), 585-590.
15. Fan, F. Q.; Stebe, K. J. Langmuir 2004, 20(8), 3062-3067.
16. Fan, F. Q.; Stebe, K. J. Langmuir 2005, 21(4), 1149-1152.
17. Yu, P.; Kim, S. J.; Marcus, H. L.; Papadimitrakopoulos, F. J. Mater. Sci. 2008, 43, 803-812.
18. Jud, P. P.; Nellen, P. M.; Sennhauser, U. Adv. Eng. Mater. 2005, 7(5), 384-388.
19. Martelli, C.; Olivero, P.; Canning, J.; Groothoff, N.; Gibson, B.; Huntington, S. Opt. Lett. 2007, 32(11), 1575-1577.
20. Young. R. J. Vacuum 1993, 44(3-4), 353-356.
21. Woldering, L. A.; Otter, A. M.; Husken, B. H.; Vos, W. L. Nanotechnology 2006, 17(23), 5717-5721.
22. Snoeks, E.; van Blaaderen, A.; van Dillen, T.; van Kats, C. M.; Brongersma, M. L.; Polman, A. Adv. Mater. 2000, 12(20), 1511-1514.
23. Snoeks, E.; van Blaaderen, A.; van Dillen, T.; van Kats, C. M.; Velikov, K.; Brongersma, M. L.; Polman, A. Nucl. Instrum. Methods Phys. Res., Sect. B 2001, 178, 62-68.
24. van Dillen, T.; Polman, A.; Fukarek, W.; van Blaaderen, A. Appl. Phys. Lett. 2001, 78(7), 910-912.
25. van Dillen, T.; Snoeks, E.; Fukarek, W.; van Kats, C. M.; Velikov, K. P.; van Blaaderen, A.; Polman, A. Nucl. Instrum. Methods Phys. Res., Sect. B 2001, 175, 350-356.
26. Van Le, T.; Ross, E. E.; Velarde, T. R. C.; Legg, M. A.; Wirth, M. J. Langmuir 2007, 23(16), 8554-8559.
27. Prevo, B. G.; Hwang, Y.; Velev, O. D. Chem. Mater. 2005, 17(14), 3642-3651.
28. Prevo, B. G.; Velev, O. D. Langmuir 2004, 20(6), 2099-2107.
29. Jiang, P.; McFarland, M. J. J. Am. Chem. Soc. 2004, 126(42), 13778-13786.
30. Jiang, P.; Prasad, T.; McFarland, M. J.; Colvin, V. L. Appl. Phys. Lett. 2006, 89(1), 011908.
31. Mihi, A.; Ocana, M.; Miguez, H. Adv. Mater. 2006, 18(17), 2244.
32. Prenitzer, B. I.; Urbanik-Shannon, C. A.; Giannuzzi, L. A.; Brown, S. R.; Irwin, R. B.; Shofner, T. L.; Stevie, F. A. Microsc. Microanal. 2003, 9(3), 216-236.
33. White, H.; Pu, Y.; Rafailovich, M.; Sokolov, J.; King, A. H.; Giannuzzi, L. A.; Urbanik-Shannon, C.; Kempshall, B. W.; Eisenberg, A.; Schwarz, S. A.; Strzhemeckny, Y. M. Polymer 2001, 42(4), 1613-1619.