Fabrication of submicron IrO2 nanowire array biosensor platform by conventional complementary metal-oxide-semiconductor process

Japanese Journal of Applied Physics

Volumn 47, Issue 2 PART 1, 2008, Pages 1147-1151

  Zhang, Fengyan ^a   Ulrich, Bruce ^a   Reddy, Ravi K ^b   Venkatraman, Vinu L ^b   Prasad, Shalini ^b   Vu, Tania Q ^c   Hsu, Sheng Teng ^a  

^a SHARP LABORATORIES OF AMERICA   (United States)

^b Portland State University   (United States)

^c Oregon Health and Science University Department of Biomedical Engineering   (United States)

Author keywords

Biosensor platform; CMOS; IrQ2; MEA; Nanowires

Indexed keywords

BIOSENSORS; DIELECTRIC DEVICES; ELECTRIC CONDUCTIVITY; ELECTRIC WIRE; FABRICATION; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOWIRES; SEMICONDUCTOR MATERIALS; SIGNAL TRANSDUCTION; SINGLE CRYSTALS;

BIOSENSOR PLATFORM; CHEMICAL VAPOR DEPOSITION METHODS; CMOS; COMPLEMENTARY; FABRICATION METHODS; HIGH RELIABILITIES; IRQ2; LARGE-SCALE; LIFE SCIENCES; LOW COSTS; LOW MANUFACTURING COSTS; MEA; MULTIPLE ELECTRODE ARRAYS; NANODEVICES; NANOWIRE ARRAYS; PRACTICAL METHODS; RELIABLE; REPRODUCIBILITY; SEMICONDUCTOR PROCESSES; SUBMICRON; WAFER SURFACES;

CHEMICAL VAPOR DEPOSITION;

EID: 52649083065     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.1147     Document Type: Article

References (31)

1. P. Alivisatos: Nat, Biotechnol. 22 (2004) 47.
2. Y. Cui, Q. Wei, H. Park, and C. M. Lieber: Science 293 (2001) 1289.
3. J. R. Heath, M. E. Phelps, and L. Hood: Mol. Imaging Biol. 5 (2003) 312.
4. R. Fan, R. Karnik, M. Yue, D. Li, A. Majumdar, and P. Yang: Nano Lett. 5(2005) 1633.
5. F. Patolsky, B. P. Timko, G. Zheng, and C. M. Lieber: MRS Bull. 32 (2007) 142.
6. D. Wang, B. A. Sheriff, and J. R. Heath: Nano Lett. 6 (2006) 1096.
7. M. R. Stan, P. D. Franzon, S. C. Goldstein, J. C. Lach, and M. M. Ziegler: Proc. IEEE 91 (2003) 1940.
8. N. T. Kovtyukhova and T. E. Mallouk: Chem. - Eur, J. 8 (2002) 4354.
9. P. A. Smith, C. D. Nordquist, T. N. Jackson, and T. S. Mayer: Appl. Phys. Lett. 77 (2000) 1399.
10. Y. Huang, X. Duan, Q. Wei, and C. M. Lieber: Science 291 (2001) 630.
11. S. Auvray: Nano Lett. 5 (2005) 451.
12. K. Keren, R. S. Berman, E. Buchstab, U. Sivan, and E. Braun: Science 302 (2003) 1380.
13. J. Zhou, Y. Ding, S. Z. Deng, L. Gong, N. S. Xu, and Z. L. Wang: Adv. Mater. 17 (2005) 2107.
14. H. Huang, O. K. Tan, Y. C. Lee, T. D. Tran, M. S. Tse, and X. Yao: Appl. Phys. Lett. 87 (2005) 163123.
15. O. K. Varghese, D. Gong, M. Paulose, K. G. Ong, and C. A. Grimes: Sens. Actuators B 93 (2003) 338.
16. F. Zhang, J.-S. Maa, S. T. Hsu, S. Ohnishi, and W. Zhen: Jpn. J. Appl. Phys. 38 (1999) L1447.
17. S. Gottesfeld and J. D. E. McIntyre: J. Electrochem. Soc. 126 (1979) 742.
18. S. Trasatti: Electrochim. Acta 36 (1991) 225.
19. A. Fog and R. P. Buck: Sens. Actuators 5 (1984) 137.
20. J. V. Dobson, P. R. Snodin, and H. R. Thirsk: Electrochim. Acta 21 (1976) 527.
21. I. Lauks, M. F. Yuen, and T. Dietz: Sens. Actuators 4 (1983) 375.
22. K. Izutsu and H. Yamamoto: Anal. Sci. 12 (1996) 905.
23. R. A. Buchanan, I.-S. Lee, and J. M. Williams: J. Biomed. Mater. Res. 24 (1990) 309.
24. J. M. Williams, I.-S. Lee, and R. A. Buchanan: Surf. Coat. Tcchnol. 51 (1992) 385.
25. L. S. Robblee and T. L. Rose: in Neural Prostheses Fundamental Studies, ed. W. F. Agnew and D. B. McCreery (Prentice Hall, Englewood Cliffs, NJ, 1990) p. 25.
26. L. S. Robblee, J. L. Lefko, and S. B. Brummer: J. Electrochem. Soc. 130 (1983) 731.
27. L. D. Burke, J. K. Mulcahy, and D. P. Whelan: J. Electroanal. Chem. 163(1984) 117.
28. R. K. Jaworski and J. A. Cox: J. Electrounal. Chem. 325 (1992) 111.
29. T. Katsube, I. Lauks, and J. N. Zemel: Sens. Actuators 2 (1981-1982) 399.
30. G. Papeschi, S. Bordi, C. Béni, and L. Ventura: Biochim. Biophys. Acta: Protein Struct. 453 (1976) 192.
31. F. Zhang, R. Barrowcliff, G. Stecker, W. Pan, D. Wang, and S. T. Hsu: Jpn. J. Appl. Phys. 44 (2005) L398.