Understanding repeatability in nanoscale electro-machining process

Transactions of the North American Manufacturing Research Institution of SME

Volumn 36, Issue , 2008, Pages 145-152

  Kalyanasundaram, Valliappa ^a   Virwani, Kumar R ^b   Spearot, Douglas E ^a   Rajurkar, Kamlakar P ^c   Malshe, Ajay P ^a  

^a University of Arkansas   (United States)

^b VEECO INSTRUMENTS INC   (United States)

^c UNIVERSITY OF NEBRASKA LINCOLN   (United States)

Author keywords

Nanomanufacturing repeatability; Nanoscale electro machining; Nanotool analysis; Scanning probe microscopy (SPM); Tip based nanomanufacturing

Indexed keywords

BEFORE AND AFTER; IN-SITU; MACHINING PROCESSES; MANUFACTURING RESEARCH INSTITUTION; NANO SCALING; NANO-MANUFACTURING; NANO-TOOLS; NANOMANUFACTURING REPEATABILITY; NANOSCALE ELECTRO-MACHINING; NANOTOOL ANALYSIS; QUALITY CRITERION; RELIABLE METHOD; SCANNING PROBE MICROSCOPY (SPM); SCANNING-TUNNELING MICROSCOPE; TIP-BASED NANOMANUFACTURING;

HIGH RESOLUTION ELECTRON MICROSCOPY; INDUSTRIAL RESEARCH; MACHINING; MACHINING CENTERS; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; RESEARCH; SOCIETIES AND INSTITUTIONS;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;

EID: 52349084513     PISSN: 10473025     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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