A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator

Optics Express

Volumn 16, Issue 19, 2008, Pages 14421-14428

  Takahashi, Kazunori ^a   Kanamori, Yoshiaki ^a   Kokubun, Yasuo ^b   Hane, Kazuhiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b YOKOHAMA NATIONAL UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DROPS; ELECTROSTATICS; MICROOPTICS; OPTICAL RESONATORS; RESONATORS; SILICON; WAVEGUIDES;

COMB ACTUATOR; COUPLING EFFICIENCY; ELECTROSTATIC COMB DRIVES; FULL-WIDTH HALF-MAXIMUM BANDWIDTHS; SILICON MICRORING RESONATORS; SUSPENSION ARMS; VARIABLE COUPLING; WAVELENGTH-SELECTIVE;

ELECTROSTATIC ACTUATORS;

ARTICLE; ELECTRICITY; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; FILTRATION; INSTRUMENTATION; LIGHT; NANOTECHNOLOGY; OPTICS; TRANSDUCER;

ELECTRONICS; ELECTROSTATICS; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; FILTRATION; LIGHT; MINIATURIZATION; NANOTECHNOLOGY; OPTICS; TRANSDUCERS;

EID: 51849101669     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.16.014421     Document Type: Article

References (22)

1. B. Jalali and S. Fathpour, "Silicon photonics," J. Lightwave Technol. 24, 4600-4615 (2006).
2. H. Yamada, T. Chu, S. Ishida, Y. Arakawa, "Si photonic wire waveguide devices," IEEE J. Sel. Topics Quantum Electron. 12, 1371-1379 (2006).
3. A. Sasaki, G. Hara, T. Baba, "Propagation characteristics of ultrahigh-Δ optical waveguide on silicon-on-insulator substrate," Jpn. J. Appl. Phys. 40, L383-L385 (2001).
4. W. Bogaerts, P. Dumon, D.V. Thourhout, D. Taillaert, P. Jaenen. J. Wouters, S. Beckx, V. Wiaux, R. G. Baets, "Compact wavelength-selective functions in silicon-on-insulator photonics wires," IEEE J. Sel. Topics Quantum Electron. 12, 1394-1401 (2006).
5. 2 size based on Si photonic wire waveguides," Electron. Lett. 41, 801-802 (2005).
6. A. Vorckel, M. Monster, W. Henschel, P. H. Bolivar, H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop multiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).
7. E. Bulgan, Y. Kanamori, K. Hane, "Submicron silicon waveguide optical switch driven by microelectromechanical actuator," Appl. Phys. Lett. 92, 101110 (2008).
8. A. Liu, R. Jones, L. Liao, D. Samara-Bublo, D. Rubin, O. Cohen, R. Nicolaescu, M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature, 427, 615-618 (2004).
9. C. Gunn, "CMOS photonics for high-speed interconnects," IEEE Micro, 26, 58-66 (2006).
10. T. Kato, S. Suzuki, Y. Kokubun, S. T. Chu, "Coupling-loss reduction of a vertically coupled microring resonator filter by spot-size matched busline waveguide," Appl. Opt. 41, 4394-4399 (2002).
11. T. Ito, Y. Kokubun, "Nondestructive measurement of propagation loss and coupling efficiency in microring resonator filters using filter responses," Jpn. J. Appl. Phys. 43, 1002-1005 (2004).
12. Y. Goebuchi, T. Kato, Y. Kokubun, "Fast and stable wavelength-selective switch using double-series coupled dielectric microring resonator." IEEE Photon. Technol. Lett. 18, 538-540 (2006).
13. W. M. J. Green, R. L. Lee, G. A. DeRose, A. Scherer, A. Yariv, "Hybrid InGaAsP-InP Mach-Zehnder racetrack resonator for thermooptic switching and coupling control." Opt. Express 13, 1651-1659 (2005).
14. U. Levy, K. Campbell, A. Groisman, S. Mookherjea, Y. Fainman, "On-chip microfluidic tuning of an optical microring resonator," Appl. Phys. Lett. 88, 11107 (2006).
15. T. J. Wang, C. H. Chu, C. Y. Lin, "Electro-optically tunable microring resonators on lithium niobate," Opt. Lett. 32, 2777-2779 (2007).
16. K. E. Moselund, P. Dainesi, M. Declercq, M. Bopp, P. Coronel, T. Skotnicki, A. M. Ionescu, "Compact gate-all-around silicon light modulator for ultra high speed operation," Sensors Actuators A, 130-131, 220-227 (2006).
17. G. Sekiguchi, N. Kobayashi, Y. Kokubun, "Coupling efficiency control of vertically coupled microring resonator filter by microactuator," IEEE Photon. Technol. Lett. 18, 2141-2143 (2006).
18. J. Yao, D. Leuenberger, M. M. Lee, M. C. Wu, "Silicon microtoroidal resonators with integrated MEMS tunable coupler," IEEE Sel. Topics Quantum Electron. 13, 202-208 (2007).
19. T. Fukazawa, T. Hirano, F. Ohno, T. Baba, "Low loss intersection of Si photonic wire waveguides," Jpn. J. Appl. Phys. 43, 646-647 (2004).
20. L. Martines and M. Lipson, "High confinement suspended micro-ring resonators in silicon-on-insulator," Opt. Express 14, 6259-6263 (2006).
21. Y. Fukuta, H. Fujita, H. Toshiyoshi, "Vapor hydrofluoric acid sacrificial release technique for micro electro mechanical systems using labware," Jpn. J. Appl. Phys. 42, 3690-3694 (2003).
22. K.Okamoto, Fundamentals of optical waveguides. Tokyo, Corona Press, pp. 158-165 (1996).