Propagation characteristics of ultrahigh-Δ optical waveguide on silicon-on-insulator substrate

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 40, Issue 4 B, 2001, Pages

  Sakai, A ^a   Hara, G ^a   Baba, T ^a  

^a YOKOHAMA NATIONAL UNIVERSITY   (Japan)

Author keywords

Integrated photonics; Lightwave circuit; Optical waveguide; SOI

Indexed keywords

ELECTRIC LOSSES; ELECTRON BEAM LITHOGRAPHY; ETCHING; INDUCTIVELY COUPLED PLASMA; LIGHT PROPAGATION; LIGHT SCATTERING; REFRACTIVE INDEX; SILICON ON INSULATOR TECHNOLOGY; SUBSTRATES;

LIGHTWAVE CIRCUITS;

OPTICAL WAVEGUIDES;

EID: 0035870350     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.l383     Document Type: Article

References (8)