Technology options for developing manufacturable non-silicon nanoelectronics

2002 23rd International Conference on Microelectronics, MIEL 2002 - Proceedings

Volumn 1, Issue , 2002, Pages 83-89

  Singh, R ^a   Poole, K F ^a   Vellanki, A ^a   Alluri, P ^a  

^a South   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMONDS; FIELD EFFECT TRANSISTORS; METAL INSULATOR BOUNDARIES; SILICON;

COMPLIMENTARY METAL OXIDE SEMICONDUCTORS; DIRECT WRITING; HETEROGENEOUS INTEGRATION; NANO-DIMENSIONS; NOVEL PROCESSING; SILICON SUBSTRATES; SILICON-BASED; TECHNOLOGY OPTIONS;

MICROELECTRONICS;

EID: 51749112554     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MIEL.2002.1003152     Document Type: Conference Paper

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