Instrument Design for Sub-PPB Oxygenated Contaminants Detection in Semiconductor Processing

Journal of the IEST

Volumn 40, Issue 4, 1997, Pages 17-21

  Man, Kin F ^a   Boumsellek, Saïd ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Contamination control; Mass spectrometry; Moisture detector; Oxygen detector; Processing environment; Ray tracing; Resonant electron attachment; Reversal ionizer; Sub ppb detection

Indexed keywords

COMPUTER SIMULATION; COMPUTER SOFTWARE; DISSOCIATION; IMPURITIES; IONS; MASS SPECTROMETERS; MOISTURE; SEMICONDUCTOR DEVICE MANUFACTURE; SENSITIVITY ANALYSIS; TRACE ELEMENTS; VAPORS; COMPUTATIONAL METHODS; ELECTRONS; IONIZATION OF GASES; MASS SPECTROMETRY; OXYGEN; POLLUTION DETECTION;

ELECTRON IONIZERS; MONATOMIC OXYGEN IONS; SOFTWARE PACKAGE SIMION; TRAJECTORY MODELING; GRIDDLED ELECTRON IONIZERS;

OXYGEN SENSORS; POLLUTION CONTROL EQUIPMENT;

EID: 0345908677     PISSN: 10984321     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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