Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 2008, Pages 190-195

  Tiggelman, M P J ^a   Reimann, K ^b   Liu, J ^b   Klee, M ^c   Keur, W ^c   Mauczock, R ^c   Schmitz, J ^a   Hueting, R J E ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b NXP SEMICONDUCTORS   (Netherlands)

^c PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CAPACITORS; DIELECTRIC DEVICES; DIELECTRIC LOSSES; ELECTRIC EQUIPMENT;

HIGH-DENSITY; TEST STRUCTURES; WIDE BANDWIDTH;

LOSSES;

EID: 51449098981     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMTS.2008.4509337     Document Type: Conference Paper

References (13)

1. S. Chang and S. Sivoththaman, A Tunable RF MEMS Inductor on Silicon Incorporating an Amorphous Silicon Bimorph in a Low-Temperature Process. IEEE Electron Device Letters, vol. 27. no. 11. pp. 905-907, November 2006.
2. Th.G.S.M. Rijks, P.G. Steeneken, J.T.M. van Beek , M.J.E. Ulenaers, A. Jourdain, H.A.C. Tilmans, J. De Coster, and R. Puers, Microelectro-mechanical Tunable Capacitors for Reconfigurable RF Architectures. Journal of Micromechanical Microengineering, vol. 16. pp. 601-611, February 2006.
3. K. Buisman, L.C.N, de Vreede, L.E. Larson, M. Spirito, A. Akhnoukh, Y. Lin, X.-d. Liu, and L.K. Nanver, A Monolithic Low-Distortion Low-Loss Silicon-on-Glass Varactor-Tuned Filter with Optimized Biasing, IEEE Microwave and Wireless Component Letters, vol. 17. no. 1. pp. 58-60, January 2007.
4. J.A. Yeh. C.A. Chang. C.-C. Cheng. J.-Y. Huang, and S.S.H. Hsu. Microwave Characteristics of Liquid-Crystal Tunable Capacitors, IEEE Electron Device Letters, vol. 26, no. 7, pp. 451-453. July 2005.
5. N. Setter et al., Ferroelectric thin films: Review of Materials, Properties, and Applications, Journal of Applied Physics, vol. 100, no. 051606, September 2006.
6. Z. Ma, A.J. Becker, P. Polakos, H. Huggins, J. Pastalan, H. Wu, K. Watts, Y.H. Wong, and P. Mankiewich, RF Measurement Technique for Characterizing Thin Dielectric Films. IEEE Transactions on Microwave Theory and Techniques, vol. 45, no. 8, pp. 1811-1816, August 1998.
7. S.B. Cohn, Problems in Strip Transmission Lines. IEEE Trans. on Microwave Theory and Techniques, vol. 3. Issue 2,pp. 119-126, March 1955.
8. T.H. Lee. Planar Microwave Engineering. ISBN 0521835267, Cambridge University Press, pages 233-237, 2004.
9. A.K. Tagantsev. V.O. Sherman, K.F. Astafiev, J. Venkatesh. and N. Setter, Ferroelectric Materials for Microwave Tunable Applications, Journ. of Electromagnetics, vol. 11, no. 1-2, pp. 5-66, September 2003.
10. P. Rundqvist, A. Vorobiev, S. Gevorgian, and K. Khamchane, Non-Destructive Microwave Characterization of Ferroelectric Films on Conductive Substrates. Integrated Ferroelectrics. vol. 60, no. 1. pp. 1-19, February 2004.
11. (2007) The Sonnet website. [Online]. Available: http://www. sonnetsoftware.com/
12. P.K. Petrov, N.McN. Alford, and S. Gevorgyan. Techniques for Microwave Measurements of Ferroelectric Thin Films and Their Associated Error and Limitations,Mess, Sci. Technol., vol. 16. pp. 583-589, January 2005.
13. th ARFTG Conf. Dig., pp. 57-62, November 1990.