Techniques for microwave measurements of ferroelectric thin films and their associated error and limitations

Measurement Science and Technology

Volumn 16, Issue 2, 2005, Pages 583-589

  Petrov, P K ^a   Alford, N McN ^a   Gevorgyan, S ^b,c  

^a LONDON SOUTH BANK UNIVERSITY   (United Kingdom)

^b CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^c Microwave/High Speed Elect Res   (Sweden)

Author keywords

Capacitance; Microwave devices; Microwave loss; Network analyser; Permittivity; Probe station

Indexed keywords

ALGORITHMS; CAPACITORS; DIELECTRIC LOSSES; MICROWAVE MEASUREMENT; PERMITTIVITY; REFLECTION; RESONANCE; SENSITIVITY ANALYSIS;

CAPACITANCE-PERMITTIVITY; MICROWAVE PROPERTIES; PLANAR CAPACITORS; RESONANCE-TYPE MEASUREMENTS;

FERROELECTRIC THIN FILMS;

FILM; MEASUREMENT METHOD;

EID: 14044262827     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/16/2/035     Document Type: Article

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