Superlateral growth of a-Ge film by excimer laser annealing

Applied Physics Letters

Volumn 93, Issue 9, 2008, Pages

  Yeh, Wenchang ^a   Chen, Hsinchi ^a   Huang, Hsiangen ^a   Hsiao, Chihping ^a   Jeng, Jengywan ^a  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; CRYSTALLIZATION; EXCIMER LASERS; GAS LASERS; GERMANIUM; SOLIDIFICATION;

AB SORPTION COEFFICIENTS; EXCIMER-LASER ANNEALING; SUPER-LATERAL GROWTH;

ANNEALING;

EID: 51349168547     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2977965     Document Type: Article

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