Single-resonator fourth-order micromechanical disk filters

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 207-210

  Demirci, Mustafa U ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; ELECTRIC FILTERS; ELECTRIC LOADS; NATURAL FREQUENCIES; RESONATORS; THERMAL EFFECTS;

COUPLING LINKS; DISK FILTERS; FILTER RESPONSE; INSERTION LOSS;

MICROELECTROMECHANICAL DEVICES;

EID: 26844559031     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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