X-ray scattering and diffraction from ion beam induced ripples in crystalline silicon

Journal of Applied Physics

Volumn 104, Issue 4, 2008, Pages

  Biermanns, Andreas ^a   Pietsch, Ullrich ^a   Grenzer, Jörg ^b   Hanisch, Antje ^b   Facsko, Stefan ^b   Carbone, Geradina ^c   Metzger, Till Hartmut ^c  

^a UNIVERSITY OF SIEGEN   (Germany)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^c EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE SILICONS; RIPPLE FORMATION; SI(001) SURFACES; X -RAY SCATTERING;

SILICON;

EID: 50849104772     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2973037     Document Type: Article

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