Synthesis and dielectric properties of (Ba,Ca)(Zr,Ti)O3 thin films using metal-organic precursor solutions

Thin Solid Films

Volumn 516, Issue 23, 2008, Pages 8408-8413

  Mimura, Ken ichi ^a   Naka, Takafumi ^a   Shimura, Tetsuo ^a   Sakamoto, Wataru ^a   Yogo, Toshinobu ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

(Ba,Ca)(Zr,Ti)O3; Chemical solution deposition; Dielectric properties; Thin film

Indexed keywords

CALCIUM; DIELECTRIC PROPERTIES; OXIDE MINERALS; PEROVSKITE; ZIRCONIUM;

(BA,CA)(ZR,TI)O3; CHEMICAL SOLUTION DEPOSITION; THIN FILM;

BARIUM;

EID: 50849096390     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.04.068     Document Type: Article

References (18)

1. Toyoda M., and Lubis M.Y.S. J. Sol-Gel Sci. Technol. 16 (1999) 7
2. Choi W.S., Jang B.S., Lim D.-G., Yi J., and Hong B. J. Cryst. Growth 237-239 (2002) 438
3. Choi W.S., Jang B.S., Roh Y., Yi J., and Hong B. J. Non-Cryst. Solids 303 (2002) 190
4. Miyazaki A., Sakamoto W., Yogo T., and Hirano S. Ceram. Trans. 112 (2001) 261
5. Tanaka K., Suzuki K., Nishizawa K., Miki T., and Kato K. Jpn. J. Appl. Phys. 1 44 (2005) 6885.
6. Mimura K., Naka T., Shimura T., Sakamoto W., and Yogo T. Trans. Mater. Res. Soc. Jpn. 31 (2006) 89
7. Dobal P.S., Dixit A., Katiyar R.S., Yu Z., Guo R., and Bhalla A.S. J. Appl. Phys. 89 (2001) 8085
8. Tohma T., Masumoto H., and Goto T. Jpn. J. Appl. Phys. 1 41 (2002) 6643
9. James A.R., and Prakash C. Appl. Phys. Lett 84 (2004) 1165
10. Cramer N., Philofsky E., Kammerdiner L., and Kalkur T.S. Appl. Phys. Lett. 84 (2004) 771
11. Verbitskaia T.N., Zhdnov G.S., Venevtsev Iu.N., and Soloviev S.P. Sov. Phys. Crystallogr. 3 (1958) 182
12. Hennings D., Schenell A., and Simon G. J. Am. Ceram. Soc. 65 (1982) 539
13. Dixit A., Majumder S.B., Dobal P.S., Katiyar R.S., and Bhalla A.S. Thin Solid Films 447-448 (2004) 284
14. Hotta Y., Hassink G.W., Kawai T., and Tabata H. Jpn. J. Appl. Phys. 1 42 (2003) 5908
15. Lee Y.C., Lee W.S., and Shieu F.S. J. Mater. Sci. 37 (2002) 2699
16. Guo Y., Suzuki K., Nishizawa K., Miki T., and Kato K. Jpn. J. Appl. Phys. 45 1 (2006) 855
17. Jiwei Z., Xi Y., Bo S., Liangying Z., and Chen H. J. Electroceram. 11 (2003) 157
18. Sakamoto W., Mimura K., Naka T., Shimura T., and Yogo T. J. Sol-Gel Sci. Technol. 45 (2007) 213