The evolution of the structure and mechanical properties of fullerenelike hydrogenated amorphous carbon films upon annealing

Journal of Applied Physics

Volumn 104, Issue 4, 2008, Pages

  Wang, Qi ^a,b   He, Deyan ^a   Wang, Chengbing ^b   Wang, Zhou ^b   Zhang, Junyan ^b  

^a LANZHOU UNIVERSITY   (China)

^b LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON; AMORPHOUS FILMS; AMORPHOUS SILICON; ANNEALING; ATMOSPHERIC HUMIDITY; CARBON; CARBON CLUSTERS; CARBON NANOTUBES; CHLORINE COMPOUNDS; FRICTION; HYDROGENATION; HYDROGENOLYSIS; MECHANICAL PROPERTIES; METALLIC MATRIX COMPOSITES; MICROSTRUCTURE; PLASMA DEPOSITION; SEMICONDUCTING SILICON COMPOUNDS; SILICON; STRUCTURAL ANALYSIS; THICK FILMS;

HYDROGENATED CARBON FILMS;

CARBON FILMS;

EID: 50849087038     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2969768     Document Type: Article

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