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Volumn 4, Issue SUPPL.1, 2007, Pages
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High rate deposition of Al2O3 coatings reactively sputter deposited
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Author keywords
Aluminium; Coating; Oxide; Sputtering; Tribology
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Indexed keywords
ALUMINIUM;
CRYSTALLINE PHASE;
HIGH DEPOSITION RATES;
HIGH HARDNESS;
HIGH PERFORMANCE COATINGS;
HIGH TEMPERATURE STABILITY;
HIGH-RATE DEPOSITION;
LOW FRICTION COEFFICIENTS;
TARGET TEMPERATURE;
TRIBOLOGICAL TESTS;
ALUMINUM;
DEPOSITION RATES;
FRICTION;
TRIBOLOGY;
TUNGSTEN CARBIDE;
PROTECTIVE COATINGS;
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EID: 43049146905
PISSN: 16128850
EISSN: 16128869
Source Type: Journal
DOI: 10.1002/ppap.200730606 Document Type: Conference Paper |
Times cited : (6)
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References (19)
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