Effect of Al addition on structure and properties of sputtered TiC films

Plasma Processes and Polymers

Volumn 4, Issue SUPPL.1, 2007, Pages

  Soldán, Jan ^a   Musil, Jindrřich ^a   Zeman, Petr ^a  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

Al doping; Magnetron sputtering; Mechanical properties; Oxidation resistance; Structure; TiC Al films

Indexed keywords

AL CONTENT; AL DOPING; AL FILMS; AL THIN FILMS; FILM MICROHARDNESS; FILM STRUCTURE; GRADUAL CHANGES; INNER DIAMETERS; MACROSTRESSES; STRUCTURE; STRUCTURE AND PROPERTIES; TIC-AL FILMS; UNBALANCED MAGNETRON; X-RAY AMORPHOUS;

AMORPHOUS FILMS; CRYSTALLINE MATERIALS; MAGNETRONS; MECHANICAL PROPERTIES; METALLIC FILMS; OXIDATION; OXIDATION RESISTANCE; STRUCTURAL PROPERTIES; TEMPERATURE INDICATING CAMERAS; TITANIUM CARBIDE;

ALUMINUM;

EID: 50449083062     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200730102     Document Type: Conference Paper

References (18)

1. A. A. Voevodin, J. S. Zabinski, J. Mater. Sci. 1998, 33, 319.
2. W. P. Hsieh, D. Y. Wang, F. S. Shieu, J. Vac. Sci. Technol. 1999, A17, 1053.
3. B. K. Tay, Y. H. Cheng, X. Z. Ding, S. P. Lau, X. Shi, G. F. You, D. Sheeja, Diamond Relat. Mater. 2001, 10, 1082.
4. P. Zhang, B. K. Tay, C. Q. Sun, S. P. Lau, J. Vac. Sci. Technol. 2002, A20, 1390.
5. S. Zhang, X. L. Bui, Y. Fu, Thin Solid Films 2004, 467, 261.
6. H. J. Brinkman, F. Zupanic, J. Duszczyk, L. Katgerman, J. Mater. Res. 2000, 15(12), 2620.
7. P. Li, E. G. Kandalova, V. I. Nikitin, A. G. Makarenko, A. R. Luts, Z. Yanfei, Scripta Materialia 2003, 49, 699.
8. J. Soldan, J. Musil, Vacuum 2006, 81, 531.
9. H. O. Pierson, "Handbook of Refractory Carbides and Nitrides", Noyes Publications, New Jersey 1996.
10. R. Riedel, "Handbook of Ceramic Hard Materials", John Wiley & Sons, Germany 2000.
11. J. D. Wilcock, D. S. Campbell, Thin Solid Films 1969, 3, 3.
12. E. A. Brandes (Ed.), "Smithells Metals Reference Book", 6th edition, Butterworths, London 1983.
13. M. Hansen, "Constitution of Binary Alloys", McGraw-Hill Book Company, Inc.. NY 1958, p. 409.
14. J. Musil, A. J. Bell, J. Vlcek, T. Hurkmans, J. Vac. Sci. Technol. 1996, A14(4), 2247.
15. I. E. Campbell, "High-Temperature Technology", John Wiley &Sons, New York 1956, p. 121.
16. T. Z. Tsui, G. M. Pharr, W. C. Oliver, C. S. Bhatia, R. L. White, S. Anders, A. Anders, I. G. Brown, Mater. Res. Soc, Symp. Proc. 1995, 383, 447.
17. J. Musil, M. Jirout, Surf. Coat. Technol. 2006, (in press).
18. M. Jirout, J. Musil, Surf. Coat. Technol. 2006, 200, 6792.