Variable capacitors and tunable LC-tanks formed by CMOS-compatible metal MEMS for RF ICs

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2007, Pages 427-430

  Gu, Lei ^a   Li, Xinxin ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CAPACITORS; CMOS INTEGRATED CIRCUITS; COMPOSITE MICROMECHANICS; DIELECTRIC DEVICES; ELECTRIC CURRENTS; ELECTRIC EQUIPMENT; ELECTRON DEVICES; ENERGY STORAGE; LITHOGRAPHY; MEMS; METALS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; NONMETALS; OPTICAL DESIGN; RESONANCE; SILICON; STANDARDS; SUBSTRATES; TANKS (CONTAINERS);

ANTI-VIBRATION; CMOS-COMPATIBLE; HIGH Q-FACTOR; L-C TANK; LC-TANKS; LOW TEMPERATURE; LOW-TEMPERATURE PROCESSING; MEMS PROCESS; MOBILE APPLICATIONS; POST-CMOS; RESONANT FREQUENCIES; SELF-RESONANCE FREQUENCY; SILICON SUBSTRATES; SOLENOID INDUCTORS; SUBSTRATE LOSSES; SUSPENDED STRUCTURES; TWO LAYERS; VARIABLE CAPACITORS;

VARIABLE FREQUENCY OSCILLATORS;

EID: 50249134872     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2007.4418964     Document Type: Conference Paper

References (9)

1. C. T. C. Nguyen, L. P. B. Katehi and G. M. Rebeiz, "Micromachined devices for wireless communication," Proceedings of the IEEE vol.86, pp. 1756-1768.Aug. 1998.
2. J. Chen, J. Zou, C. Liu, J. S. Aine and S. Kang, "Design and modeling of a micromachined high-Q tunable capacitor with large tuning range and a vertical planar spiral inductor", IEEE Trans. Electron Devices, vol.50, 2003, pp.730-739.
3. L. Gu and X. X. Li, "A Post-CMOS Concave-Suspending MEMS Process in Standard Silicon Wafers for High-Performance Solenoidal-DNA-Configured Micro-Transformers," in IEDM'06, pp.521-524.
4. R. Gaddi, A. Gnudi, E. Franchi, D. Guermandi, P. Tortori, B. Marqesin and F. Giacomozzi, "Reconfigurable MEMS-enabled LC-tank for multi-band CMOS oscillator," IEEE Microwave Symp.Dig. pp. 1353-1356. June 2005.
5. A. D. Yalcinkaya, S. Jensen and O. Hansen, "Low voltage, high-Q SOI MEMS varactors for RF applications," IEEE Solid-State Circuits Conf. ESSCIRC'03, pp.607-610, Sept. 2003.
6. A. Oz and G. K. Fedder, "CMOS-compatible RF MEMS tunable capacitors," IEEE Microwave Symp.Dig., pp.A97-A100, June 2003.
7. D. M. Klymyshyn, D. T. Haluzan, M. Borner, S. Achenbach, J. Mohr, and T. Mappes, "High aspect ratio vertical cantilever RF-MEMS variable capacitor," IEEE Microw. Wirel. Co. vol.17, pp.127-129, Feb. 2007.
8. A. B. Yu, A. Q. Liu and Q. X. Zhang, "Tunable MEMS LC tank resonator with large tuning range," IEE Electronics letters, vol.41 pp.855-857. July 2005.
9. T. Ketterl. T. Weller and D. Fries, "A micromachined tunable CPW resonantor," IEEE Microwave Symp.Dig.pp.345-348, 2001.