Tunable MEMS LC resonator with large tuning range

Electronics Letters

Volumn 41, Issue 15, 2005, Pages 855-857

  Yu, A B ^a   Liu, A Q ^a   Zhang, Q X ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT SWITCHES; SHUNT INDUCTORS; TUNABLE RESONATORS; VOLTAGE-CONTROL OSCILLATORS (VCO);

ELECTRIC FREQUENCY CONTROL; MATHEMATICAL MODELS; NATURAL FREQUENCIES; OPTICAL RESONATORS; TUNING; VOLTAGE CONTROL;

MICROELECTROMECHANICAL DEVICES;

EID: 23344439820     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20051497     Document Type: Article

References (5)

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2. Ketterl, T., Weller, T., and Fries, D.: 'A micromachined tunable CPW resonator', IEEE MTT-S Int. Microw. Symp. Dig., 2001, 1, pp. 345-348
3. Gupta, K.C., Garg, R., and Bahl, I.: 'Microstrip lines and slotlines' (Artech, Dedham, MA, 1996)
4. Muldavin, J.B.: 'Design and analysis of series and shunt MEMS switches'. Ph.D. thesis, University of Michigan, 2001
5. Yu, A.B., Liu, A.Q., Zhang, Q.X., Alphones, A., Zhu, L., and Peter, S.A.: 'Improvement of isolation MEMS capacitive switch via membrane planarization', Sens. Actuators A, Phys., 2005, 119, (1), pp. 206-213