High sensitivity optical position sensitive detectors fabricated from high resistivity substrates

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7003, Issue , 2008, Pages

  Henry, J ^a   Livingstone, J ^a  

^a UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

Author keywords

Crystalline silicon; High resistivity; Position sensitive detectors

Indexed keywords

AMORPHOUS SILICON; CHEMICAL VAPOR DEPOSITION; CRYSTALLINE MATERIALS; DISPLAY DEVICES; METALS; NONMETALS; OPTICAL DESIGN; RESEARCH; SCHOTTKY BARRIER DIODES; SENSORS; SILICON; SUBSTRATES;

CRYSTALLINE SILICON; CRYSTALLINE SILICONS; DIFFERENT EFFECTS; FABRICATION TECHNIQUES; HIGH RESISTIVITY; HIGH SENSITIVITIES; HIGH-RESISTIVITY SUBSTRATES; LIGHT BEAMS; OPTICAL-; POSITION SENSITIVE DETECTORS; PRECISION MEASUREMENTS; RAPID RESPONSE; RESEARCH WORKS; ROBOTIC VISION; SCHOTTKY; SCHOTTKY BARRIER; SILICON STRUCTURES; SUBSTRATE RESISTIVITY; WHITE-LIGHT;

OPTICAL SENSORS;

EID: 50249085968     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.780173     Document Type: Conference Paper

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