|
Volumn 13, Issue 12-13, 2001, Pages 1022-1026
|
Thin-film amorphous silicon position-sensitive detectors
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ADHESION;
AMORPHOUS MATERIALS;
COMPUTER VISION;
CONTROL SYSTEMS;
CRYSTAL GROWTH;
SEMICONDUCTING SILICON;
SPUTTER DEPOSITION;
THIN FILMS;
HYDROGEN CONTENT CONTROL;
INDUSTRIAL ALIGNMENT;
MACHINE CONTROL SYSTEM;
POSITION SENSITIVE DETECTOR;
OPTICAL SENSORS;
|
EID: 0035806602
PISSN: 09359648
EISSN: None
Source Type: Journal
DOI: 10.1002/1521-4095(200107)13:12/13<1022::aid-adma1023>3.0.co;2-i Document Type: Article |
Times cited : (100)
|
References (15)
|