Gap measurement by position-sensitive detectors

Applied Optics

Volumn 39, Issue 16, 2000, Pages 2584-2591

  Kim, Jung Ki ^a   Kim, Man Suhk ^a   Bae, Jong Han ^a   Kwon, Jin Hyuk ^a   Lee, Hang Boo ^b   Jeong, Soo Hoa ^b  

^a Yeungnam University   (South Korea)

^b LG Electronics Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; DIGITAL SIGNAL PROCESSING; LASER BEAMS; LITHOGRAPHY; MASKS; SUBSTRATES;

POSITION-SENSITIVE DETECTORS (PSD);

OPTICAL SENSORS;

EID: 0038109719     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.002584     Document Type: Article

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