A 4 × 4 tin oxide gas sensor array with surface micro-machined convex micro-hotplates

Proceedings of IEEE Sensors

Volumn , Issue , 2006, Pages 224-227

  Guo, Bin ^a   Bermak, Amine ^a   Chan, Philip C H ^a   Yan, Gui Zhen ^b  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^b PEKING UNIVERSITY   (China)

Author keywords

Convex microhotplates; Gas sensor array; Membrane stress; Tin oxide

Indexed keywords

ANNEALING; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; ELECTROMECHANICAL DEVICES; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROMECHANICS; OPTICAL DESIGN; SENSORS; TIN; TITANIUM COMPOUNDS;

ANNEALING PROCESSING; CMOS COMPATIBILITY; CONVEX MICROHOTPLATES; FABRICATION PROCESSES; GAS SENSOR ARRAY; LOW-YIELD; MEMBRANE STRESS; MICRO-ELECTRO MECHANICAL SYSTEMS; MICRO-HOTPLATES; OXIDE GAS; POWER CONSUMPTION; SACRIFICIAL LAYERS; SURFACE MICRO-MACHINING; TIN OXIDE;

MACHINING;

EID: 50149122438     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.355762     Document Type: Conference Paper

References (11)

1. S. Capone, A. Forleo, L. Francioso, R. Relia, P. Siciliano, J. Spadavecchia et al., "Solid State Gas Sensors: State of the Art and Future Activities", Journal of Optoelectronics and Advanced Materials, Vol. 5, No. 5, 2003, pp. 1335-1348.
2. 2 Sensors: Current Status and Future Prospects", Sensors and Actuators B, 26/27, 1995, pp. 1-12.
3. Muhammad Y. Afridi, John S. Suehle, Mona E. Zaghloul, David W. Brning, Allen R. Hefner, Richard E. Cavicchi et al., "A monolithic CMOS Microhotplate-Based Gas Sensor System", IEEE Sensors Journal, Vol. 2, No. 6, Dec 2002, pp. 644-655.
4. U. Frey, M. Graf, S. Taschini, K.-U. Kirstein, C. Hagleitner, A. Hierlemann, and H. Baltes, "A Digital CMOS Micro-Hotplate Array for Analysis of Environmentally Relevant Gases", ESSCIRC 2004, Sep 2004, pp. 299-302.
5. Keith J. Albert, Nathan S. Lewis, Caroline L. Schauer, Gregory A. Sotzing, Shannon E. Stitzel and David R. Walt, "Cross-Reactive Chemical Sensor Arrays", Chem. Rev., 2000, 100, 2595-2626.
6. Alex I.K. Lao, Thomas M.H. Lee, I-Ming Hsing and Nancy Y. Ip, "Precise temperature control of microfluidic chamber for gas and liquid phase reactions", Sensors and Actuators, 84, 2000, pp.
7. G. Sberveglieri, W. Hellmich and G. Mller, "Silicon hotplates for metal oxide gas sensor elements", Microsystem Technologies, 3, 1997, pp. 183-190.
8. Campbell, S. A., The Science and Engineering of Microelectronic Fabrication (Second Edition), Oxford University Press, Inc., 2001, pp. 555-559.
9. Guizhen Yan, Zhenan Tang, Philip C.H. Chan, Johnny K.O. Sin, I-Ming Hsing and Yangyuan Wang, "An experimental study on high-temperature metallization for micro-hotplate-based integrated gas sensors", Sensors and Actuators B, 86, 2002, pp. 1-11.
10. A.V. Tadeev, G. Delabouglise, and M. Labeau, "Influence of Pd and Pt additives on the microstructural and electrical properties of SnO2-based sensors", Materials Science and Engineering, B57, 1998, pp. 76-83.
11. Zhang Tao, Hou Junda, and Liang Hong, "Modification of tin dioxide thin films by ion implantation", Applied Surface Science, 161, 2000, pp. 459-464.