Electrostatic silicon microgripper with low voltage of actuation

2007 International Symposium on Micro-NanoMechatronics and Human Science, MHS

Volumn , Issue , 2007, Pages 344-349

  Wierzbicki, Rafał ^a   Adda, Cédric ^b   Hötzendorfer, Harald ^b  

^a Nascatec GmbH   (Germany)

^b TECNALIA RESEARCH AND INNOVATION   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

GRIPPERS; NONMETALS; OPTICAL DESIGN; SILICON; SOCIAL SCIENCES;

COMB-DRIVE ACTUATORS; DESIGN CONSIDERATIONS; DRIVING VOLTAGES; HUMAN SCIENCES; INTERNATIONAL SYMPOSIUM; LOW VOLTAGES; MICRO GRIPPERS; NANOMECHATRONICS; OPERATING RANGES;

DESIGN OF EXPERIMENTS;

EID: 50149089166     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MHS.2007.4420878     Document Type: Conference Paper

References (20)

1. B. E. Voland, H. Heerlein, and I. W. Rangelow, "Electrostatically driven microgripper," Microelectron. Eng., vol. 61-62, pp. 1015-1023, 2002.
2. Project ROBOSEM (GIRD-CT-2002-00675) Final Report, 2006.
3. W.C. Tang, "Electrostatic Comb Drive for Resonant Sensor and Actuator Applications" Ph.D. Dissertation, 1990.
4. C.-J. Kim, A. P. Pisano, and R. S. Muller, "Silicon-processed overhanging microgripper," J. Microelectromech. Syst., vol. 1, 1992.
5. Y. Sun, D. Piyabongkarn, A. Sezen, B.J. Nelson, R. Rajamani, R. Schoch, D.P. Potasek, "A Novel Dual-Axis Electrostatic Microactuation System for Micromanipulation" IEEE/RSJ Int. Conf: on Intelligent Robots and Systems, 30 Sept.-5 Oct. 2002 p. 1796 - 1801 vol.2
6. F. Beyeler, A. Neild, S. Oberti, D.J. Bell, Y. Sun, J. Dual, and B.J. Nelson, "Monolithically Fabricated Microgripper With Integrated Force Sensor for Manipulating Microobjects and Biological Cells Aligned in an Ultrasonic Field", J. Microelectromech. Syst., vol. 16, 2007
7. K. Molhave, O. Hansen "Electro-thermally actuated microgrippers with integrated force-feedback", J. Micromech. Microeng. 15 1265-1270, 2005
8. I. Giouroudi, D. Andrijasevic, H Hötzendorfer, J. Kosel, W. Brenner: "Developemnet of a Microgripping System for Handling of Micro Components"; EUSPEN 2006 "Proc. 6th Internat. conf. Euspen 2006", Vol. 1 (2006), 369 - 372
9. S. Senturia "Microsystem Design", Kluwer Academic Publishers, 2001
10. D. Elata, V. Leus, "How slender can comb-drive fingers be?" J. Micromech. Microeng. 15 1055-1059, 2005.
11. T. Hirano, T. Furuhata, K.J. Gabriel, H. Fujita, "Design, fabrication, and operation of submicron gap comb-drive microactuators", Journal of Microelectromechanical Systems, 1, p.p 52-59, 1992
12. T. Soumart, T. Michalske, K. Zavadil "Frequency-Dependent Electrostatic Actuation in Microfluidic MEMS" Journ. of Microelectromech. Systems, 14, 2005.
13. B. Borovic, F.L. Lewis, A.Q. Liu, E.S. Kolesar and D. Popa, "The lateral instability problem in electrostatic comb drive actuators: modeling and feedback control", 2006 J. Micromech. Microeng. 16 1233-1241
14. R. Legtenberg, A. Groeneveld, M. Elwenspoek "Comb drive actuators for large displacements", J. Micromech. Microeng. 6 (1996), 320 - 329
15. Y. Zhao and T.Cui, "Fabrication of high-aspect-ratio polymer-based electrostatic comb drives using the hot embossing technique", J. Micromech. Microeng. 13 430-435, 2003
16. K.E. Petersen "Silicon as a mechanical material" IEEE Proc. vol. 70, No. 5, 1982
17. R. Wierzbicki, "ASSEMIC Brainstorming Workshop Report: Topic B", 2006.
18. J. J.Wortman and R. A. Evans, "Young's modulus, shear modulus, and Poisson's ratio in silicon and germanium", J. Applied Physics, vol. 36(1), pp. 153-156, Jan. 1965.
19. F. Laemer, A. Urban "Milestones in Deep Reactive Ion Etching", TRANSDUCERS'05.
20. K. Ogata "System Dynamics", © 2004 Pearson Education, Inc.