Wafer-level measurement of thermal conductivity on thin films

Proceedings of IEEE Sensors

Volumn , Issue , 2006, Pages 1239-1242

  Roncaglia, Alberto ^a   Mancarella, Fulvio ^a   Sanmartin, Michele ^a   Elmi, Ivan ^a   Cardinali, Gian Carlo ^a   Severi, Maurizio ^a  

^a CNR Consiglio Nazionale delle Ricerche   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; LEVEL MEASUREMENT; LIGHT METALS; NONMETALS; OPTICAL DESIGN; OXIDE FILMS; PHOTORESISTS; POLYSILICON; SENSORS; SILICA; SILICON COMPOUNDS; SILICON WAFERS; STANDARDS; THERMAL CONDUCTIVITY; THERMAL INSULATING MATERIALS; THERMOANALYSIS; THERMODYNAMIC PROPERTIES; THERMOELECTRICITY; THICK FILMS; THIN FILMS;

ELECTRICAL INSTRUMENTATION; HEAT EXCHANGING; MEMS FABRICATION; MICROMACHINED; POLY-CRYSTALLINE SILICON; SILICON OXIDES; TEST STRUCTURES; WAFER LEVELS;

THERMAL CONDUCTIVITY OF SOLIDS;

EID: 50149083283     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.355852     Document Type: Conference Paper

References (6)

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