Variable nano-grating for tunable filters

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 2417-2420

  Zhang, X M ^a   Zhao, Q W ^a   Zhong, T ^a   Yu, A B ^a,b   Khoo, E H ^a   Lu, C ^c   Liu, A Q ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

^c HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

Author keywords

Microelectromechanical systems (MEMS); Nano optics; Subwavelength grating; Thermal actuator; Tunable filter

Indexed keywords

ACTUATORS; MICROSYSTEMS; OPTICAL ENGINEERING; OPTICAL INSTRUMENTS; SENSORS; TRANSDUCERS; WAVE FILTERS;

ACTUATOR ARRAYS; DRIVING CURRENTS; FILTER APPLICATIONS; GRATING DESIGN; GRATING PERIODS; GUIDED-MODE RESONANCE; INTERNATIONAL CONFERENCES; MICROELECTROMECHANICAL SYSTEMS (MEMS); NANO GRATINGS; NANO-OPTICAL DEVICES; NANO-OPTICS; NARROW BANDS; SOLID-STATE SENSORS; SUB-WAVELENGTH GRATINGS; SUBWAVELENGTH GRATING; THERMAL ACTUATOR; TRANSMISSIVITY; TUNABLE FILTER; TUNABLE FILTERING; WIDE BANDS;

NANOSENSORS;

EID: 50049128086     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300658     Document Type: Conference Paper

References (15)

1. H. Kikuta, H. Toyota and W. Yu, "Optical elements with subwavelength structured surfaces," Opt. Rev., vol. 10, no. 2, pp. 63-73, 2003.
2. S. Y. Chou, S. Schablitsky, and L. Zhuang, "Subwavelength transmission gratings and their applications in VCSELs," Proc. SPIE 3290, 24-30 Jan 1998, San Jose, CA, USA, pp. 73-81.
3. S. Y. Chou and W. Deng, "Subwavelength amorphous silicon transmission gratings and applications in polarizers and waveplates," Appl. Phys. Lett., vol. 67, no. 6, pp. 742-744, 1995.
4. Y. Kanamori and K. Hane, "Broadband antireflection subwavelength ratings for polymethyl methacrylate fabricated with molding technique," Opt. Rev., vol. 9, no. 5, pp. 183-185, 2002.
5. C. F. R. Mateus, M. C. Y. Huang, Y. Deng, A. R. Neureuther, and C. J. Chang-Hasnain, "Ultrabroadband mirror using low-index cladded subwavelength grating," IEEE Photon. Technol. Lett., vol. 16, no. 2, pp. 518-520, 2004.
6. P. C. Deguzman and G. P. Nordin, "Stacked subwavelength gratings as circular polarization filters," Appl. Opt., vol. 40, no. 31, pp. 5731-5737, 2001.
7. B. Wilson and L. Y. Lin, "Polarization control via tunable nano-structures in PDMS," Proc. Optical MEMS 2006, 21-24 Aug 2006, Big Sky, Montana, USA, pp. 189-190.
8. S. Uma, R. Matusiak, D. L. Hecht, and E. J. Shrader, "Elastomer- based diffractive optical modulator," IEEE J. Sel. Top. Quantum Electron., vol. 10, no. 3, pp. 435-439, 2004.
9. M. Aschwanden and A. Stemmer, "Polymeric, electrically tunable diffraction grating based on artificial muscles," Opt. Lett., vol. 31, no. 17, pp. 2610-2612, 2006.
10. C. W. Wong, Y. Jeon, G. Barbastathis, and S-G Kim, "Analog piezoelectric-driven tunable gratings with nanometer resolution," IEEE J. Microelectromech. Syst., vol. 13, no. 6, pp. 998-1005, 2004.
11. X. M. Zhang and A. Q. Liu, "A MEMS pitchtunable grating add/drop multiplexers," Proc. Optical MEMS 2000, 21-24 Aug 2000, Kauai, Hawaii, USA, pp. 25-26.
12. W-C Shih, S-G Kim, and G. Barbastathis, "High-resolution electrostatic analog tunable grating with a single-mask fabrication process," IEEE J. Microelectromech. Syst., vol. 15, no. 4, pp. 763-769, 2006.
13. M. Tormen, Y-A Peter, P. Niedermann, A. Hoogerwerf and R. Stanley, "Deformable MEMS grating for wide tunability and high operating speed," J. Opt. A: Pure Appl. Opt., vol. 8, pp. S337-S340, 2006.
14. M. G. Moharam and T. K. Gaylord, "Three-dimensional vector coupled-wave analysis of planar-grating diffraction," J. Opt. Soc. Am. A, vol. 73, pp. 1105-1112, 1983.
15. A. B. Yu, X. M. Zhang, Q. X. Zhang and A. Q. Liu, "Rhombic-shaped thermal actuator array for evenly-distributed very large displacement," Proc. MEMS 2007, 21-25 Jan 2007, Kobe, Japan, pp. 663-666.