High-resolution electrostatic analog tunable grating with a single-mask fabrication process

Journal of Microelectromechanical Systems

Volumn 15, Issue 4, 2006, Pages 763-769

  Shih, Wei Chuan ^a   Kim, Sang Gook ^a   Barbastathis, George ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

Diffraction gratings; Electrostatic; Fabrication; High resolution; Microelectromechanical systems (MEMS); Single mask; Tunable

Indexed keywords

COMPUTER SIMULATION; ELECTROSTATIC DEVICES; LITHOGRAPHY; MASKS; SEMICONDUCTOR DEVICE MANUFACTURE; TUNING;

GRATING PITCH; SINGLE-MASK FABRICATION; TRANSVERSE ACTUATION;

DIFFRACTION GRATINGS;

EID: 33747413703     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.879369     Document Type: Article

References (17)

1. R. B. Apte, F. Sandejas, W. Banyai, and D. Bloom, "Deformable grating light valves for high resolution displays," presented at the Solid State Sensors and Actuators Workshop Hilton Head Island, SC, Jun. 13-16, 1994.
2. O. Solgaard, F. S. A. Sandejas, and D. M. Bloom, "Deformable grating optical modulator," Opt. Lett., vol. 17, pp. 688-690, 1992.
3. M. B. Sinclair, M. A. Butler, A. J. Ricco, and S. D. Senturia, "Synthetic spectra: A tool for correlation spectroscopy," Appl. Opt., vol. 36, pp. 3342-3348, 1997.
4. D. E. Sene, V. M. Bright, J. H. Comtois, and J. W. Grantham, "Polysilicon micromechanical gratings for optical modulation," Sens. Actuators A, Phys., vol. 57, pp. 145-151, 1996.
5. X. M. Zhang and A. Q. Liu, "A MEMS pitch-tunable grating add/drop multiplexers," presented at the IEEE/LEOS Int. Conf. Optical MEMS, Kauai, HI, Aug. 21-24, 2000.
6. H. Mavoori, S. Jin, R. P. Espindola, and T. A. Strasser, "Enhanced thermal and magnetic actuations for broad-range tuning of fiber Bragg grating-based reconfigurable add-drop devices," Opt. Lett., vol. 24, pp. 714-716, 1999.
7. D. M. Burns and V. M. Bright, "Development of microelectromechanical variable blaze gratings," Sens. Actuators A, Phys., vol. 64, pp. 7-15, 1998.
8. W.-C. Shih, C. W. Wong, Y. B. Jeon, S.-G. Kim, and G. Barbastathis, "Electrostatic and piezoelectric analog tunable diffractive gratings," presented at the Conf. Lasers and Electro-Optics, Long Beach, CA, May 21-26, 2002.
9. W.-C. Shih, C. W. Wong, Y. B. Jeon, S.-G. Kim, and G. Barbastathis, "MEMS tunable gratings with analog actuation," Inf. Sci., vol. 149, pp. 31-40, 2003.
10. C. W. Wong, Y. Jeon, G. Barbastathis, and S.-G. Kim, "Analog piezoelectric-driven tunable gratings with nanometer resolution," J. Microelectromech. Syst., vol. 13, no. 6, pp. 998-1005, Dec. 2004.
11. W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, "Laterally driven polysilicon resonant microstructures," Sens. Actuators, vol. 20, pp. 25-32, 1989.
12. S. D. Senturia, Microsystem Design. Norwell, MA: Kluwer, 2001.
13. J. W. Goodman, Introduction to Fourier Optics, 2nd ed. New York: McGraw-Hill, 1996.
14. M. Born, E. Wolf, and A. B. Bhatia, Principles of Optics: Electromagnetic Theory of Propagation, Interference and Diffraction of Light, 7th ed. Cambridge, U.K.: Cambridge Univ. Press, 1999, (expanded).
15. C. Q. Davis and D. M. Freeman, "Using a light microscope to measure motions with nanometer accuracy," Opt. Eng., vol. 37, pp. 1299-1304, 1998.
16. K. Ogata, Modern Control Engineering, 4th ed. Englewood Cliffs, NJ: Prentice-Hall, 2002.
17. W.-C. Shih, C. Hidrovo, S.-G. Kim, and G. Barbastathis, "Optical diversity by nanoscale actuation," presented at the IEEE Nanotechnology Conf., San Francisco, CA, Aug. 12-14, 2003.