Subwavelength transmission gratings and their applications in VCSELs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3290, Issue , 1998, Pages 73-81

  Chou, Stephen Y ^a   Schablitsky, Steve ^a   Zhuang, Lei ^a  

^a Princeton University   (United States)

Author keywords

Band filter; Birefringence; Electron beam lithography; Gratings; High frequency pulse; Lasers; Nanoimprint lithography; Polarization; Subwavelength

Indexed keywords

AMORPHOUS SILICON; BIREFRINGENCE; ELECTRON BEAM LITHOGRAPHY; LASERS; LIGHT POLARIZATION;

SUBWAVELENGTH TRANSMISSION GRATINGS (SWTG); VERTICAL-CAVITY SURFACE-EMITTING LASERS (VCSEL);

DIFFRACTION GRATINGS;

EID: 0032400623     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.298228     Document Type: Conference Paper

References (25)