Si3N4 thin films proprerties for RF-MEMS reliability investigation

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 579-582

  Lamhamdi, M ^a,b   Boudou, L ^b   Pons, P ^a   Guastavino, J ^b   Belarni, A ^b   Dilhan, M ^b   Segui, Y ^b   Plana, R ^a  

^a LAAS CNRS   (France)

^b CNRS   (France)

Author keywords

Charge and discharging processes; Charge imaging by atomic force microscopy; Dielectric charging; Failure modes and mechanisms; FTIR; Micro switches; Reliability; RF MEMS

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; CHEMICAL BONDS; FINANCE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; IMAGING TECHNIQUES; MECHANISMS; MICROSCOPIC EXAMINATION; MICROSYSTEMS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; QUANTUM CHEMISTRY; SCANNING PROBE MICROSCOPY; SENSORS; THICK FILMS; THIN FILMS; TRANSDUCERS;

AND DETECTION; CHARACTERIZATION METHODS; CHARGE AND DISCHARGING PROCESSES; CHARGE IMAGING BY ATOMIC FORCE MICROSCOPY; CHARGING BEHAVIOR; CHEMICAL-; CONDUCTION MECHANISMS; DEPOSITION PARAMETERS; DIELECTRIC CHARGING; ELECTRICAL CHARGING; ELECTRICAL FIELDS; FAILURE MODES AND MECHANISMS; FTIR; INTERNATIONAL CONFERENCES; MICRO-SWITCHES; NANO-METER SCALE; RELIABILITY; RF MEMS; SOLID-STATE SENSORS; TRANSIENT CURRENTS;

FEES AND CHARGES;

EID: 50049125331     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300196     Document Type: Conference Paper

References (5)

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2. G. J. Papaioannou and al., "Effect of space charge polarization in radio frequency micro-electro- mechanical system capacitive switch dielectric charging" Appl. Phys. Lett. 89, 103512 (Sept 2006).
3. M. Lamhamdi and al., "Charging-Effects in RF Capacitive Switches Influence of insulating layers composition "Microelectronics Reliability 46 (2006) 1700-1704
4. G. N. Parsons and al., "Low hydrogen content stoichiometric silicon nitride films deposited by plasma-enhanced chemical vapour deposition" J. Appl. Phys., 70 (3), 1 August 1991, 125 pp 1553-1560.
5. R.Dianoux and al., Detection of electrostatic forces with an atomic force microscope: Analytical and experiment dynamic force curves in the nonlinear regime. PHYSICAL REVIEW B 68; 045403 (July 2003).