Quartz-crystal cantilevered resonator for nanometric sensing

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 247-251

  Lin, Yu Ching ^a   Ono, Takahito ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

AT cut quartz crystal; Force sensor; Quartz crystal resonator; Scanning probe microscopy

Indexed keywords

NANOTECHNOLOGY; NATURAL FREQUENCIES; PIEZOELECTRICITY; SURFACE TOPOGRAPHY; VIBRATIONS (MECHANICAL);

AT-CUT QUARTZ CRYSTAL; FORCE SENSORS; QUARTZ CRYSTAL RESONATORS; SCANNING PROBE MICROSCOPY;

CRYSTAL RESONATORS;

EID: 27544479504     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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