Quartz thickness-shear mode pressure sensor design for enhanced sensitivity

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 45, Issue 5, 1998, Pages 1196-1203

  Clayton, Lawrence D ^a   Eernisse, Errol P ^b  

^a Iomega Corp   (United States)

^b QHrlüdyne Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLOW OF FLUIDS; MECHANICAL PERMEABILITY; PERFORMANCE; PETROLEUM RESERVOIRS; POROSITY; PRESSURE GAGES; PRESSURE MEASUREMENT; WELL TESTING;

ENHANCED SENSITIVITY; QUARTZ THICKNESS SHEAR MODE PRESSURE SENSOR;

PRESSURE TRANSDUCERS;

EID: 0032154781     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.726443     Document Type: Article

References (10)

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3. L. D. Clayton and E. P. EerNisse. Quartz resonator frequency shifts computed using the finite element, method, Int.. .1. Numer. Methods Eng., vol. 36, pp. 385 401, 1993.
4. - -, Frequency shift calculations for quartz resonators. in Proc. 45th Annu. Symp. Freq. Gontr., 1991, pp. 309-320.
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6. H. E. Karrer and J. Leach, A quartz resonator pressure transducer, IEEE Trans. Ultrason.. Ferroelect., Freq. Contr.. vol. IECI-16. no. 1. pp. 44-50, 1969.
7. [71 D. L. Hammond and A. Benjaminson, The crystal resonator: A digital transducer, IEEE Spectrum, vol. 6, issue 4, pp. 53-58. Apr. 1969.
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9. L. D. Clayton, Pressure sensor with enhanced sensitivity, U.S. Patent 5,578,759, Mov. 26, 1996.
10. L. D. Clayton and E. P. EerNisse, Application of finite element analysis to the design of quart/, thick ness-shear mode pressure sensors, in Proc. 50th Annu. Symp. Freq. Contr., 1996, pp. 541-549.