Fabrication and characterization of micromachined quartz-crystal cantilever for force sensing

Journal of Micromechanics and Microengineering

Volumn 15, Issue 12, 2005, Pages 2426-2432

  Lin, Yu Ching ^a   Ono, Takahito ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; MICROMACHINING; PIEZOELECTRICITY; QUARTZ; REACTIVE ION ETCHING; RESONATORS; SHEAR STRESS; VIBRATIONS (MECHANICAL);

ELECTRICAL AXIS; PIEZOELECTRIC EFFECT; QUARTZ CANTILEVER; QUARTZ CRYSTAL;

CANTILEVER BEAMS;

EID: 27944502012     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/15/12/026     Document Type: Article

References (22)

1. Wiesendanger R and Güntherodt H-J 1992 Scanning Tunneling Microscopy: II (Berlin: Springer)
2. Züger O and Rugar D 1994 Magnetic resonance detection and image using force microscope techniques J. Appl. Phys. 75 6211-6
3. Zhang Z and Hammel P C 1998 Magnetic resonance force microscopy with a ferromagnetic tip mounted on the force detector Solid-State Nucl. Magn. Resonan. 11 65-72
4. Rugar D, Stipe B C, Mamin H J, Yannoni C S, Stowe T D, Yasumura K Y and Kenny T W 2000 3rd Int. Conf. on Non-Contact Atomic Force Microscopy (Hamburg, Germany, 16-19 July)
5. EerNisse E and Wiggins R 2001 Review of thickness-shear mode quartz resonator sensors for temperature and pressure IEEE Sensors J. 1 79-87
6. Clayton L and EerNisse E 1998 Quartz thickness-shear mode pressure sensor design for enhanced sensitivity IEEE Trans. Ultrason. Ferroelectr. Freq. Control 45 1196-203
7. Su X, Dai C, Zhang J and O'Shea S 2002 Quartz tuning fork biosensor Biosensors Bioelectron. 17 111-7
8. Bruckenstein S and Shay M 1985 Experimental aspects of use of the quartz crystal microbalance in solution Electrochim. Acta 30 1295-300
9. Veríssimo M I S, Mantas P O, Senos A M R, Oliveira J A B P and Gomes M T S R 2003 Suitability of PZT ceramics for mass sensors versus widespread used quartz crystals Sensors Actuators B 95 25-31
10. Auge J, Hauptmann P, Hartmann J, Rösler S and Lucklum R 1995 New design for QCM sensors in liquids Sensors Actuators B 24 43-8
11. Todorovic M and Schultz S 1998 Miniature high-sensitivity quartz tuning fork alternating gradient magnetometry Appl. Phys. Lett. 73 3595-7
12. Karrai K and Grober R D 1995 Piezoelectric tip-sample distance control for near field optical microscopes Appl. Phys. Lett. 66 1842-4
13. Rozhok S and Chandrasekhar V 2002 Application of commercially available cantilevers in tuning fork scanning probe microscopy (SPM) studies Solid-State Commun. 121 683-6
14. King G M, Lamb J S and Nunes G 2001 Quartz tuning forks as sensors for attractive-mode force microscopy under ambient conditions Appl. Phys. Lett. 79 1712-4
15. Ono T, Lin Y-C and Esashi M 2005 Scanning probe microscopy with quartz crystal cantilever Appl. Phys. Lett. 87 074102
16. Kaspar M, Stadler H, Weiß T and Ziegler Ch 2000 Thickness shear mode resonators ('mass-sensitive devices') in bioanalysis Fresenius J. Anal. Chem. 366 602-10
17. Hung V N, Abe T, Minh P N and Esashi M 2002 Miniaturized, highly sensitive single-chip multichannel quartz-crystal microbalance Appl. Phys. Lett. 81 5069-71
18. Abe T and Esashi M 2000 One-chip multichannel quartz crystal microbalance (QCM) fabricated by Deep RIE Sensors Actuators 82 139-43
19. Sarid D 1994 Scanning Force Microscopy with Applications to Electric, Magnetic and Atomic Forces (New York: Oxford University Press)
20. Roark R J and Young W C 1975 Formulas for Stress and Strain (New York: McGraw-Hill)
21. Albrecht T R, Grütter P, Horne D and Rugar D 1991 Frequency modulation detection using high-Q cantilever for enhanced force microscope sensitivity J. Appl. Phys. 69 668-73
22. Rogers B, Manning L, Sulchek T and Adams J D 2004 Improving tapping mode atomic force microscopy with piezoelectric cantilevers Ultramicroscopy 100 267-76