Fabrication and test of an electrochemical microactutor

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6112, Issue , 2006, Pages

  Lee, Dong Eun ^a   Soper, Steven A ^b   Wang, Wanjun ^a  

^a Louisiana State University   (United States)

^b LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

Electrochemical micro actuator; Electrolysis; Su 8; UV LIGA

Indexed keywords

COMPUTER SIMULATION; ELECTROCHEMISTRY; ELECTRODES; ELECTROLYSIS; GLASS; PRESSURE EFFECTS; SUBSTRATES;

ELECTROCHEMICAL MICRO ACTUATORS (ECM); GAS BUBBLES; SU-8; UV-LIGA;

MICROACTUATORS;

EID: 33646077922     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.650850     Document Type: Conference Paper

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