Resolution enhancing using cantilevered tip-on-aperture silicon probe in scanning near-field optical microscopy

Ultramicroscopy

Volumn 108, Issue 10, 2008, Pages 1070-1075

  Chang, Won Seok ^a   Bauerdick, Sven ^b   Jeong, Mun Seok ^c  

^a Korea Institute of Machine and Materials   (South Korea)

^b RAITH GmbH   (Germany)

^c Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

Electromagnetic field enhancement; Electronic beam induced deposition (EBID); Scanning near field microscopy; Tip on aperture (TOA) probe

Indexed keywords

CONCENTRATION (PROCESS); ELECTRIC FIELDS; ELECTROMAGNETIC FIELD THEORY; ELECTROMAGNETIC FIELDS; ELECTROMAGNETISM; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ELECTRON OPTICS; FINITE DIFFERENCE METHOD; IMAGING TECHNIQUES; ION BOMBARDMENT; LAWS AND LEGISLATION; LIGHT; MAGNETIC FIELDS; NONMETALS; NUMERICAL ANALYSIS; OPTICAL DATA STORAGE; OPTICAL INSTRUMENTS; OPTICAL MICROSCOPY; OPTICAL SYSTEMS; PARTICLE BEAMS; SCANNING; SILICON; TIME DOMAIN ANALYSIS;

APERTURE DIAMETER; APERTURELESS SCANNING; DIFFRACTION LIMITS; ELECTROMAGNETIC FIELD ENHANCEMENT; ELECTRON-BEAM-INDUCED DEPOSITION; ELECTRONIC BEAM-INDUCED DEPOSITION (EBID); FAR FIELDS; FINITE-DIFFERENCE TIME-DOMAIN ANALYSIS; FOCUSED ION BEAM MACHINING; FOCUSED LASER BEAMS; HIGHLY EFFICIENT; LIGHT FIELDS; MICROSCOPY SYSTEMS; OPTICAL-; PLASMON ENHANCEMENT; SCANNING NEAR-FIELD MICROSCOPY; SCANNING NEAR-FIELD OPTICAL MICROSCOPY; SUB-WAVELENGTH APERTURES; TIP APEX; TIP-ON-APERTURE (TOA) PROBE;

NEAR FIELD SCANNING OPTICAL MICROSCOPY;

NANOMATERIAL; SILICON; SILVER;

ARTICLE; ELECTROMAGNETIC FIELD; ELECTRON BEAM; ILLUMINATION; MECHANICAL PROBE; SCANNING NEAR FIELD OPTICAL MICROSCOPY;

CONCENTRATING; DATA STORAGE; DEPOSITION; ELECTRIC FIELDS; ELECTROMAGNETIC FIELDS; ELECTRON BEAMS; LIGHT; LITHOGRAPHY; MAGNETIC FIELDS; MICROSCOPY; NONMETALS; OPTICAL INSTRUMENTS; PROBLEM SOLVING; SCANNING; SILICON;

EID: 49949084997     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2008.04.078     Document Type: Article

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