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Volumn 254, Issue 21, 2008, Pages 6948-6951
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STM study of titanium silicide nanostructure growth on Si(1 1 1)-(sqrt(19) × sqrt(19)) substrate
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Author keywords
Nanostructures; Scanning tunneling microscopy; Scanning tunneling spectroscopy; Titanium silicide
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Indexed keywords
ANNEALING;
EVAPORATION;
SCANNING TUNNELING MICROSCOPY;
SILICIDES;
DEPOSITED MATERIALS;
DIRECT HEATING;
EVAPORATION TIME;
NANO-ISLANDS;
NANOSTRUCTURE GROWTH;
POST DEPOSITION ANNEALING;
SCANNING TUNNELING SPECTROSCOPY;
TITANIUM SILICIDE;
NANOSTRUCTURES;
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EID: 49549095982
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2008.05.001 Document Type: Article |
Times cited : (11)
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References (17)
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