Scanning tunnelling microscopy study of initial growth of titanium suicide on Si(111)

Applied Surface Science

Volumn 130-132, Issue , 1998, Pages 13-17

  Ezoe, K ^a   Kuriyama, H ^a   Yamamoto, T ^a   Ohara, S ^a   Matsumoto, S ^a  

^a KEIO UNIVERSITY   (Japan)

Author keywords

Initial growth; Si(111); STM; Sulicide; Ti

Indexed keywords

ADSORPTION; AGGLOMERATION; ANNEALING; CRYSTAL ORIENTATION; CRYSTALLINE MATERIALS; DEPOSITION; GROWTH (MATERIALS); HIGH TEMPERATURE EFFECTS; SCANNING TUNNELING MICROSCOPY; SURFACE STRUCTURE; TITANIUM COMPOUNDS;

TITANIUM SILICIDE;

SEMICONDUCTING SILICON;

EID: 0032099227     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00017-8     Document Type: Article

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