Epitaxial titanium silicide islands and nanowires

Surface Science

Volumn 524, Issue 1-3, 2003, Pages 148-156

  He, Zhian ^a   Stevens, M ^a   Smith, David J ^a   Bennett, P A ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

Atomic force microscopy; Epitaxy; Growth; Silicon; Single crystal epitaxy; Titanium

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION; NANOSTRUCTURED MATERIALS; SINGLE CRYSTALS; TITANIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY;

NANOWIRES;

EPITAXIAL GROWTH;

EID: 0035263153     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(02)02506-2     Document Type: Article

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