Empty core screw dislocations formed on 6H-SiC(0001) during hydrogen etching

Thin Solid Films

Volumn 516, Issue 21, 2008, Pages 7530-7537

  Grodzicki, Miłosz ^a   Mazur, Piotr ^a   Zuber, Stefan ^a   Urbanik, Grzegorz ^a   Ciszewski, Antoni ^a  

^a UNIVERSITY OF WROC AW   (Poland)

Author keywords

Atomic force microscopy; Defects; Hydrogen etching; Silicon carbide

Indexed keywords

ATOMIC FORCE MICROSCOPY; ETCHING; EXTREME ULTRAVIOLET LITHOGRAPHY; HYDROGEN; IMAGING TECHNIQUES; NONMETALS; SILICON CARBIDE; SURFACE TOPOGRAPHY;

AFM IMAGING; ATOMIC FORCE MICROSCOPE; DEFECTS; EMPTY CORE; ETCHED SURFACES; ETCHING PRODUCTS; HYDROGEN ETCHING; INTRINSIC DEFECTS; OPTIMAL CONDITIONS; POLISHING PROCESSES; SCREW DISLOCATIONS;

SURFACE MORPHOLOGY;

EID: 49349103876     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.04.089     Document Type: Article

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