Feedforward hysteresis compensation in trajectory control of piezoelectrically-driven nanostagers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6173, Issue , 2006, Pages

  Bashash, Saeid ^a   Jalili, Nader ^a  

^a Clemson University   (United States)

Author keywords

Feedforward control; Hysteresis compensation; Piezoelectrically driven nanostager; Smart materials

Indexed keywords

ACTUATORS; HYSTERESIS; INTELLIGENT MATERIALS; PIEZOELECTRIC DEVICES; SENSORS;

FEEDFORWARD CONTROL; HYSTERESIS COMPENSATION; NANOSTAGERS; PIEZOELECTRICALLY-DRIVEN NANOSTAGER;

NANOTECHNOLOGY;

EID: 33745966498     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.658079     Document Type: Conference Paper

References (23)

1. Maygergoyz I., Mathematical models of hysteresis, New York: Springer-Verlag, 1991.
2. Aderiaens H., Koning W., and Baning R., "Modeling piezoelectric actuators," IEEE/ASME Transactions on Mechatronics, 5, pp. 331-341, 2000.
3. Goldfarb M., and Celanovic N., "A lumped parameter electromechanical model for describing the nonlinear behavior of piezoelectric actuators," ASME Journal of Dynamic Systems, Measurement and Control, 119, pp. 478-185, 1997.
4. Gorbet R.B., Morris K.A., and Wang D. W., "Passivity-based stability and control of hysteresis in smart actuators," IEEE Transactions on Control Systems Technology, 9, pp. 5-16, 2001.
5. Krasnosel'skii M.A., and Pokrovskii A.V., Systems with hysteresis, Berlin Heidelberg: Springer-Verlag, 1989.
6. Visintin A., Differential models of hysteresis, Berlin Heidelberg: Springer-Verlag, 1994.
7. Brokate M., and Sprekels J., Hysteresis and phase transitions, New York: Springer, 1996.
8. Ping G., and Musa J., "Generalized preisach model for hysteresis nonlinearity of piezoceramic actuators," Precision Engineering, 20, pp. 99-111, 1997.
9. Galinaitis W. S., "Two methods for modeling scalar hysteresis and their use in controlling actuators with hysteresis," Ph.D. Thesis, Virginia Polytechnic Institute and State University, Blacksburg, VA, 1999.
10. Newcomb C., and Filnn I., "Improving linearity of piezoelectric ceramic actuators," Electronics Letters, 18, pp.442-444, 1982.
11. Furutani K., Urushibata M., and Mohri N., "Displacement control of piezoelectric element by feedback of induced charge," Nanotechnology, 9, pp. 93-98, 1998.
12. Xu Y., and Meckl P.H., "Time-optimal motion control of piezoelectric actuator: STM application," Proceeding of the 2004 American Control Conference, 5, pp. 4849-4854, June 30-July 2, 2004, Boston, MA.
13. Tzen J.J., Jeng S.L., and Chieng W.H., "Modeling of piezoelectric actuator for compensation and controller design," Precision Engineering, 27, pp. 70-76, 2003.
14. Bashash S., and Jalili N., "Trajectory control of piezoelectric actuators using nonlinear variable structure control," Proceeding of International Symposium on Collaborative Research in Applied Science, October 7-9, 2005, Vancouver, BC.
15. Bashash S., Jalili N., "A new hysteresis model for piezoelectric actuators with application to precision trajectory control," Proceeding of 2005 ASME International Mechanical Engineering Congress and Exposition, November 5-11, 2005, Orlando, FL
16. Tao G., and Kokotovic P. V., "Adaptive control of plants with unknown hysteresis," IEEE Transactions on Automatic Control, 40, pp. 200-212, 1995.
17. Ku S. S., Pinsopon U., Cetinkunt S., and Nakjima S., "Design, fabrication, and real-time neural network of a three-degrees-of- freedom nanopositioner," IEEE/ASME Transactions on Mechatronics, 5, pp. 273-280, 2000.
18. Hwang C. L. and Jan C., "A reinforcement discrete neuro-adaptive control for unknown piezoelectric actuator systems with dominant hysteresis", IEEE Transactions on Neural Networks, 14, pp. 66-78, 2003.
19. Chaghai R., Lining S., Weibin R., and Liguo Ch., "Adaptive inverse control for piezoelectric actuator with dominant hysteresis," Proceeding of IEEE International Conference on Control Applications. 1, pp. 973-976, September 2-4, 2004, Taipei, Taiwan.
20. Lining S., "Tracking control of piezoelectric actuator based on a new mathematical model," Journal of Micromechanics and Microengineering, 14, pp. 1439-1444, 2004.
21. Bashash S., Jalili N., "Underlying intellectual memory-dominant nature of hysteresis in piezoelectric materials," submitted to Nature Materials, January 2006.
22. Berlincourt D., "Piezoelectric ceramics: characteristics and applications," Journal of Acoustical Society of America, 70, pp. 1586-1595, 1981.
23. Ang W. T., Garmon F. A., and Khosla P. K., Riviere C. N., "Modeling rate-dependent hysteresis in piezoelectric actuators," Proceeding of IEEE International Conference on Intelligent Robots and Systems, 2, pp. 1975-1980, October 27-3