An improved process for fabricating microlens array with high fill factor and controllable configuration

Journal of Microelectromechanical Systems

Volumn 17, Issue 4, 2008, Pages 1047-1057

  Tsou, Chingfu ^a   Lin, Chienhung ^a  

^a FENG CHIA UNIVERSITY   (Taiwan)

Author keywords

Configuration; Fill factor; Heating; Microlens array; Photoresist

Indexed keywords

CLADDING (COATING); ELECTROPLATING; FABRICATION; HEATING; METALLIZING; METALS; MOLDS; NICKEL; NICKEL ALLOYS; NICKEL PLATING; OPTICAL DESIGN; OPTICAL INSTRUMENT LENSES; OPTICAL PROPERTIES; PHOTORESISTORS; PHOTORESISTS; SEMICONDUCTING CADMIUM TELLURIDE; SHELLS (STRUCTURES); SPIN COATING; SPIN GLASS; SURFACE TREATMENT; THERMAL EXPANSION; THERMAL SPRAYING;

AIR HEATING; AIR VOLUMES; ANALYTICAL MODELLING; CONFIGURATION; FILL FACTOR; FILL FACTORS; HEATING TEMPERATURES; IMPROVED PROCESS; METAL FILMS; MICRO LENSING; MICRO MIRRORS; MICRO-LENS ARRAYS; MICROLENS ARRAY; NICKEL ELECTROPLATING; PHOTORESIST; SPIN COATINGS; SURFACE PROFILING; VIA HOLES; WET-ETCHING;

MICROLENSES;

EID: 49149105206     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.926136     Document Type: Article

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