A simple method for fabrication of thick sol-gel microlens as a single-mode fiber coupler

IEEE Photonics Technology Letters

Volumn 15, Issue 10, 2003, Pages 1410-1412

  Yu, Weixing ^a   Yuan, X C ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Couplers; Fabrication; Lenses; Optical materials

Indexed keywords

CURING; ELECTRON DEVICE MANUFACTURE; OPTICAL FIBERS; PHOTORESISTS; POLYSILANES; SOL-GELS;

POLYDIMETHYLSILOXANE; SINGLE MODE FIBER COUPLER; THICK SOL GEL MICROLENS; ULTRAPRECISION ALIGNMENT; ULTRAVIOLET CURING;

OPTICAL INSTRUMENT LENSES;

EID: 0141918525     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2003.818053     Document Type: Article

References (12)

1. P. Coudray, P. Etienne, Y. Moreau, J. Porque, and S. I. Najafi, "Sol-gel channel waveguide on silicon: Fast direct imprinting and low cost fabrication," Opt. Commun., vol. 143, pp. 199-202, 1997.
2. P. Äyräs, J. T. Rantala, S. Honkanen, S. B. Memdes, and N. Peyghambarian, "Diffraction gratings in sol-gel films by direct contact printing using a UV-mercury lamp," Opt. Commun., vol. 162, pp. 215-218, 1999.
3. X.-C. Yuan, W. X. Yu, N. Q. Ngo, and W. C. Cheong, "Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam-sensitive gray-scale mask," Opt. Express., vol. 10, pp. 303-308, 2002.
4. D. Blanc and S. Pelissier, "Fabrication of sub-micron period diffraction gratings in self-processing sol-gel glasses," Thin Solid Films., vol. 384, pp. 251-253, 2001.
5. W. X. Yu, X.-C. Yuan, N. Q. Ngo, W. X. Que, W. C. Cheong, and K. V. Koudriachov, "Single step fabrication of continuous micro-optical elements in hybrid sol-gel glass by laser direct writing," Opt. Express, vol. 10, pp. 443-448, 2002.
6. J. T. Rantala, P. Ayras, R. Levy, M. R. Descour, S. Honkanen, and N. Peyghambarian, "Fabrication of hybrid sol-gel glass microlens arrays," in Proc. SPIE, vol. 3620, 1999, pp. 212-218.
7. A. H. O. Kärkkäinen, J. T. Rantala, and D. R. Scour, "Fabrication of micro-optical structures by applying negative tone hybrid glass materials and gray scale lithography," Electron. Lett., vol. 38, pp. 23-24, 2002.
8. M. T. Gale, "Replication techniques for diffractive optical elements," Microelectron. Eng., vol. 34, pp. 321-339, 1997.
9. A. Sayah, V. K. Parashar, and M. A. M. Gijs, "Micro-replication of optical lenses in glass using a novel sol gel technology," in Proc. 15th IEEE Int. Conf. Micro Electro Mechanical Systems 2002, pp. 516-519.
10. W. Yu and X.-C. Yuan, "Point-to-point UV laser direct writing initiated volume growth in hybrid sol-gel glass for 3D microfabrication," Opt. Lett., vol. 28, pp. 1573-1575, 2003.
11. P. Heremans, M. Kuijk, R. Vounckx, and G. Borghs, "Mushroom microlenses: Optimized microlenses by reflow of multiple layers of photoresist," IEEE Photon. Technol. Lett., vol. 9, pp. 1367-1369, Oct. 1997.
12. H. H. Alhokail, "Fabrication of photoresist microlens arrays," in Proc. 10th Int. Conf. Microelectronics (ICM '98), 1998, pp. 49-52.