Investigation on wear and adhesion of graded Si/SiC/DLC coatings deposited by plasma-enhanced-CVD

Diamond and Related Materials

Volumn 17, Issue 7-10, 2008, Pages 1685-1688

  Schwarz, Ch ^a   Heeg, J ^a   Rosenberg, M ^a   Wienecke, Marion ^a  

^a Hochschule Wismar   (Germany)

Author keywords

Adhesion; DLC; EDX; PECVD; SiC; Wear

Indexed keywords

ADHESION; DLC; EDX; GRADED LAYERS; PECVD; SIC; WEAR;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 48849116860     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2008.02.039     Document Type: Article

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