Diamond-like carbon gradient film prepared by unbalanced magnetron sputtering and plasma immersion ion implantation hybrid technique

Materials Letters

Volumn 57, Issue 1, 2002, Pages 82-86

  Ma, Feng ^a   Li, Gang ^a   Li, Heqing ^a   Ma, Hongtao ^b   Cai, Xun ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

AFM; Diamond like carbon; Nano indentation; Raman scattering spectroscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; INDENTATION; ION IMPLANTATION; MAGNETRON SPUTTERING; PROTECTIVE COATINGS; RAMAN SCATTERING; RAMAN SPECTROSCOPY; STAINLESS STEEL; SUBSTRATES; SURFACE ROUGHNESS; VACUUM APPLICATIONS;

PLASMA IMMERSION ION IMPLANTATIONS (PIII); SOLID LUBRICATING COATINGS;

DIAMOND LIKE CARBON FILMS;

EID: 0036850535     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(02)00703-6     Document Type: Article

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