Visualization of microscopic stress fields in silica glass in the scanning electron microscope

Journal of the Ceramic Society of Japan

Volumn 116, Issue 1356, 2008, Pages 869-874

  Pezzotti, Giuseppe ^a   Leto, Andrea ^a   Porporati, Alessandro Alan ^a  

^a KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Cathodoluminescence; MOS; Piezo spectroscopy; Residual stress; Silica

Indexed keywords

CATHODOLUMINESCENCE; GLASS; IONIZATION OF GASES; METALS; MOLYBDENUM; MOS DEVICES; OXIDE SEMICONDUCTORS; POINT DEFECTS; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; STRESSES;

FIELD EMISSION SCANNING ELECTRON MICROSCOPES; METAL OXIDE SEMICONDUCTOR; MICROSCOPIC SCALE; OPTICALLY ACTIVE; PIEZO SPECTROSCOPY; QUANTITATIVE MEASUREMENT; STRESS FIELD;

SILICA;

EID: 48849114011     PISSN: 18820743     EISSN: 13486535     Source Type: Journal    
DOI: 10.2109/jcersj2.116.869     Document Type: Article

References (18)

1. Z. Suo, "Interfacial and Nanoscale Failure - Comprehensive Structural Integrity," 8, Elsevier Science Ltd., Amsterdam (2003) pp. 265-324.
2. Y. Hibino and H. Hanafusa, J. Non-Cryst. Solids., 107(1), 23-26 (1988).
3. I. De Wolf, M. Ignat, G. Pozza, L. Maniguet and H. E. Maes, J. Appl. Phys., 85, 6477-6485 (1999).
4. Q. Ma, S. Chiras, D. R. Clarke and Z. Suo, J. Appl. Phys., 78, 1614-1622 (1995).
5. I. De Wolf, Semicond. Sci. Technol., 11, 139-154 (1996).
6. K. Pinardi, S. C. Jain, M. Willander, A. Atkinson, H. E. Maes and D. Van Overstraeten, J. Appl. Phys., 84, 2507-2512 (1998).
7. A. Leto, A. A. Porporati, W. Zhu, M. Green and G. Pezzotti, J. Appl. Phys., 101, 093514 (2007).
8. A. Leto, M. C. Munisso, A. A. Porporati, W. Zhu and G. Pezzotti, J. Phys. Chem. A, 18380491 (2008).
9. L. Skuja, J. Non-Cryst. Solids, 179, 51-69 (1994).
10. H. J. Fitting, T. Barfels, A. N. Trukhin and B. Schmidt, J. Non-Cryst. Solids, 279, 51-59 (2001).
11. C. Donolato and P. Venturi, Phys. Stat. Sol. (a), 73, 377-387 (1982).
12. K. Kanaya and S. Okayama, J. Phys. D. Appl. Phys., 5, 42-49 (1972).
13. L. Grabner, J. Appl. Phys., 49, 580-583 (1978).
14. W. Zhu, A. A. Porporati, A. Matsutani, N. Lama and G. Pezzotti, J. Appl. Phys., 101, 103531 (2007).
15. J. Roedel, J. Kelly and B. R. Lawn, J. Am. Ceram. Soc., 73, 3313 (1990).
16. H. Tada, P. C. Paris and G. R. Irwin, "The Stress Analysis of Cracks," Handbook Del. Research Corporation, Hellertown, PA (1973).
17. T. Fett, "Computation of the Crack Opening Displacements for Vickers Indentation Cracks," Report No. FZKA 6757, Forschungszentrum Karlsruhe, Karlsruhe, Germany (2002).
18. S. M. Hu, J. Appl. Phys., 70, R53-R80 (1991).