Analysis of local mechanical stresses in and near tungsten lines on silicon substrate

Journal of Applied Physics

Volumn 85, Issue 9, 1999, Pages 6477-6485

  De Wolf, Ingrid ^b   Ignat, Michel ^a,b   Pozza, Georges ^a,b   Maniguet, Laurent ^a,b   Maes, Herman E ^b  

^a GRENOBLE INSTITUTE OF TECHNOLOGY   (France)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001240614     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.370151     Document Type: Article

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