A four-degrees-of-freedom microstage for the compensation of eccentricity of a roundness measurement machine

International Journal of Machine Tools and Manufacture

Volumn 44, Issue 4, 2004, Pages 365-371

  Liu, Chien Hung ^a   Jywe, Wen Yuh ^b  

^a Chienkuo University of Technology   (Taiwan)

^b NATIONAL FORMOSA UNIVERSITY   (Taiwan)

Author keywords

Eccentricity; Microstage; PZT; Roundness test machine; Self compensation

Indexed keywords

ACTUATORS; CALIBRATION; ERROR ANALYSIS; MACHINE DESIGN; PIEZOELECTRIC DEVICES; ROTATION; SEMICONDUCTOR LASERS;

ECCENTRICITY; MICROSTAGE; ROUNDNESS TEST MACHINE; SELF-COMPENSATION;

DEGREES OF FREEDOM (MECHANICS);

EID: 0347758796     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmachtools.2003.10.025     Document Type: Article

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